Excimer Laser Machining Of Aerospace Materials

Proudley, G.M.; Key, P.H.

doi:10.1117/12.961570

Cited by 4 publications

(1 citation statement)

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“…So far, a water jet or high power laser device has received much attention and has actively studied to understand machining process both theoretically and experimentally [1], [4][5][6][7]. Among these, an excimer laser has potential advantages in material processing where precise contour control and maximal protection of the remaining material against thermal damage are required.…”

Section: Introductionmentioning

confidence: 99%

Processing of composite materials by using laser ablation.

Yamaguchi¹,

Sekine²,

Mori

et al. 1993

J. Photopol. Sci. Technol.

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Machining of Fiber Reinforced Plastics (FRPs) were demonstrated using an intense excimer laser radiation at wavelengths of and 193 nm (ArF) and 308 nm (XeCl). Dependence of cutting performance on various parameters such as laser wavelengths, energy fluence, and pulse repetition frequency were investigated. For both wavelength, the removal rate was measured to be approximately 2 ,um/pulse with a minimum thermal degradation of the materials. The ablation threshold was greater than 0.5 J/cm2 at 193 nm. A considerably reduced threshold at 308 nm was found for the materials•taken up in this study. The cutting kerf processed by an excimer laser exhibits quite favorable for precise machining.

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Section: Introductionmentioning

confidence: 99%

Processing of composite materials by using laser ablation.

Yamaguchi¹,

Sekine²,

Mori

et al. 1993

J. Photopol. Sci. Technol.

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<title>Excimer laser processing of ceramics and fiber-reinforced polymers assisted by a diagnostic system</title>

Geiger¹,

Lutz²,

Biermann³

1991

SPIE Proceedings

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A 2J/2OHz XeC1 (308 nm) excimer laser with a flat intensity distribution is used for processing AIO3, Si3N4, SiC and AJN ceramics and short glass fibre reinforced polymers. In order to get reproducable results an excimer laser material processing system is built up including a variable optical system, diagnostics and a high precision xy-translation stage. With this system modifications ofthe surfaces at low energy densities and the production ofsubmillimeter structures at higher energy densities are investigated. Monitoring of important process and beam parameters with a diagnostic system is essential to get reproducable results. A CCD-camera system is used to measure the uniformity of the intensity distribution of the laser beam. The aim of the investigations is to find some correlation between beam and processing quality. Due to the low penetration depth of the laser beam into the material and rapid evaporation only thin layers below the workpiece surface are affected and the extension of the heat affected zones keeps extremly small. The treatment of larger areasof the materials at lower energy densities results in modifications of the surface topography. Uniform and reproducable changes of ceramics surfaces are obtained with optimized process parameters. Various mask geometries are imaged onto the surface of the material by a projection technique to produce submillimeter structures. The sharpness of the image on the workpiece surface proves to be an important parameter for producing reproducable and small structures.Larger areas are machined with the help of the xy-table. The processing quality is characterized using profilometry and scanning electron microscopy.

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