Excimer Laser Induced Nanostructuring of Silicon Surfaces

Kumar, Prashant; Krishna, Mamidipudi Ghanashyam; Bhattacharya, Atanu

doi:10.1166/jnn.2009.207

Cited by 17 publications

(16 citation statements)

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“…Current author has irradiated KrF excimer laser onto silicon surface [87] at very small angles to achieve linearly self-assembled features (as shown in Fig. 11a, 11b).…”

Section: Guided Self-assemblymentioning

confidence: 99%

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Directed Self-Assembly: Expectations and Achievements

Kumar

2010

Nanoscale Res Lett

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Nanotechnology has been a revolutionary thrust in recent years of development of science and technology for its broad appeal for employing a novel idea for relevant technological applications in particular and for mass-scale production and marketing as common man commodity in general. An interesting aspect of this emergent technology is that it involves scientific research community and relevant industries alike. Top–down and bottom–up approaches are two broad division of production of nanoscale materials in general. However, both the approaches have their own limits as far as large-scale production and cost involved are concerned. Therefore, novel new techniques are desired to be developed to optimize production and cost. Directed self-assembly seems to be a promising technique in this regard; which can work as a bridge between the top–down and bottom–up approaches. This article reviews how directed self-assembly as a technique has grown up and outlines its future prospects.

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“…Current author has irradiated KrF excimer laser onto silicon surface [87] at very small angles to achieve linearly self-assembled features (as shown in Fig. 11a, 11b).…”

Section: Guided Self-assemblymentioning

confidence: 99%

“…AFM images for silicon surface irradiated at laser fluence of 0.15 J/cm 2 and 90° angle of incidence in the proximity of c 25-micron-thick blade edge mask and c 30 micron diameter copper wire mask [87]…”

Section: Guided Self-assemblymentioning

confidence: 99%

Directed Self-Assembly: Expectations and Achievements

Kumar

2010

Nanoscale Res Lett

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“…Nonlithographic techniques such as vapour-liquid-solid technique, template assisted growth, laser and electric field nanostructuring have emerged as viable techniques for many applications. [1][2][3][4][5] On the other hand, self ordered nanostructures have been realized in recent years by a variety of chemical routes. One of the major applications of the nanostructures, either self ordered or those produced by non-lithographic techniques, is in the area of surface plasmon resonance (SPR) based devices.…”

Section: Introductionmentioning

confidence: 99%

Controlled Nanostructuring of Ag Films by Ion Beam Sputter Deposition for Surface Plasmon Resonance Applications

Brahma¹,

Gm²,

Pa³

et al. 2011

J. Nanosci. Nanotech.

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The growth of Ag nanostrucutres on borosilicate glass substrates by ion beam sputter deposition in the Ar ion energy range from 150 to 600 eV is demonstrated. Rates of deposition as low as 0.01 nm/s are achieved at an Ar ion energy of 150 eV. This leads to the formation of a random array of nearly spherical Ag particles with a mean size of approximately 100 nm, separated by distances of similar order of magnitude. The particles organize themselves into arrays over lengths of at least 10 microm. As the thickness is increased from 3 to 18 nm there is a transition in morphology from an array to linear chains and finally a dense continuous film. There is a similar microstructural evolution as a function of increasing ion energy. The plasmon resonances can be tuned depending on shape, size and interparticle distances. As the thickness of the films increase, the main plasmon peaks can be tuned from 380 to 680 nm. The spheroidal shape of the particles induces additional peaks (localized surface plasmons) centered around 430 +/- 10 nm. Detailed simulations have been carried out based on Maxwell Garnett theory to distinguish the effects of shape and size on plasmon resonances. It is demonstrated that shape rather than the size of the particles has a stronger influence on the shift in plasmon resonances.

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“…The present authors have reported on the use of a few nonlithographic techniques to realize nanostructured thin films and bulk surfaces. These are template‐assisted growth of nanowires 5, electric‐field‐induced and laser‐induced nanostructuring of thin films and bulk surfaces 6, 7. The above‐mentioned approaches exploit the thermodynamics of the interaction between condensing vapor and substrate, and the post‐growth thermodynamics of the interaction of energetic (electric or laser) fields with a thin film or bulk surface.…”

Section: Introductionmentioning

confidence: 99%

A comparative study of laser‐ and electric‐field‐induced effects on the crystallinity, surface morphology and plasmon resonance of indium and gold thin films

Kumar

Krishna

2010

Physica Status Solidi (a)

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The effects of post-deposition treatment of In and Au thin films by excimer laser and electric field are reported. The films were subjected to an electric field in the range of 0.1-3.3 kV/cm and laser irradiation in the range from 0.01 to 0.1 J/cm 2 . The effect of this treatment on the morphology and crystallinity of indium and gold thin films (10-100 nm thickness) is investigated. Indium films exhibited a three-fold grain growth at an electric field of 3.3 kV/cm. Gold thin film, on the other hand, showed significant grain growth at a much lower field of 0.6 kV/cm. The as-deposited thin films of indium and gold were amorphous but turned nanocrystalline with average crystallite sizes of 57 nm at 3.33 kV/cm and 35 nm at 0.66 kV/cm, respectively. When indium thin films were laser irradiated, flat disc-shaped grains for as-deposited thin films were transformed to spherical grains at a laser fluence of 0.02 J/cm 2 and cubical grains at 0.05 J/cm 2 . At 0.05 J/cm 2 , as-deposited amorphous indium and gold thin films turned nanocrystalline with crystallite sizes of 50 nm and 10 nm, respectively. Significantly, laser treatment causes the grain-size distribution to become narrower with a shift in mean size to larger values. Electric-field treatment on the other hand leads to a shifting of the mean grain size to larger values without affecting the distribution.

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Excimer Laser Induced Nanostructuring of Silicon Surfaces

Cited by 17 publications

References 0 publications

Directed Self-Assembly: Expectations and Achievements

Directed Self-Assembly: Expectations and Achievements

Controlled Nanostructuring of Ag Films by Ion Beam Sputter Deposition for Surface Plasmon Resonance Applications

A comparative study of laser‐ and electric‐field‐induced effects on the crystallinity, surface morphology and plasmon resonance of indium and gold thin films

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