Excimer laser doping using highly doped silicon nanoparticles

Meseth, Martin; Kunert, Bernd Christian; Bitzer, L. A.; Kunze, Frederik; Meyer, Sebastian; Kiefer, Fabian; Dehnen, M.; Orthner, Hans; Petermann, Nils; Kummer, Malin; Wiggers, Hartmut; Harder, Nils‐Peter; Benson, Niels; Schmechel, Roland

doi:10.1002/pssa.201329012

Cited by 14 publications

(10 citation statements)

References 28 publications

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Section: Applicationsmentioning

confidence: 99%

“…Meseth et al proposed heavily doped Si nanocrystals as a dopant source to produce doped bulk crystalline silicon via the laser doping method . This process involves the laser annealing of films of doped nanocrystals on bulk Si with a pulsed excimer laser . The nanocrystal plasma synthesis can be scaled to industrial levels and films can be produced at low cost using colloidal or impaction techniques .…”

Section: Applicationsmentioning

confidence: 99%

“…The aforementioned laser-doped structures were used in diodes as a proof of concept. The doped Si nanocrystals were deposited on complementarily doped Si substrates (e.g., B-doped nanocrystals on n -type substrate), HF etched, and subsequently laser annealed for device fabrication . Both n-p and p-n devices displayed similar current–voltage characteristics in the dark.…”

Section: Applicationsmentioning

confidence: 99%

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Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications

et al. 2016

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Nonthermal plasmas have emerged as a viable synthesis technique for nanocrystal materials. Inherently solvent and ligand-free, nonthermal plasmas offer the ability to synthesize high purity nanocrystals of materials that require high synthesis temperatures. The nonequilibrium environment in nonthermal plasmas has a number of attractive attributes: energetic surface reactions selectively heat the nanoparticles to temperatures that can strongly exceed the gas temperature; charging of nanoparticles through plasma electrons reduces or eliminates nanoparticle agglomeration; and the large difference between the chemical potentials of the gaseous growth species and the species bound to the nanoparticle surfaces facilitates nanocrystal doping. This paper reviews the state of the art in nonthermal plasma synthesis of nanocrystals. It discusses the fundamentals of nanocrystal formation in plasmas, reviews practical implementations of plasma reactors, surveys the materials that have been produced with nonthermal plasmas and surface chemistries that have been developed, and provides an overview of applications of plasma-synthesized nanocrystals.

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Section: Applicationsmentioning

confidence: 99%

Section: Applicationsmentioning

confidence: 99%

Section: Applicationsmentioning

confidence: 99%

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Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications

et al. 2016

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“…Thus, the material forms tubular structures within the short time it is molten, leading to the meander structures observed. Note that non‐ porous films can be obtained, e.g., using a Si wafer as a substrate and applying very high fluences .…”

Section: Processing To Nanocrystalline Bulk and Laser‐sintered Thin Fmentioning

confidence: 99%

Silicon‐based nanocomposites for thermoelectric application

Schierning

Stoetzel

Chavez

et al. 2016

Physica Status Solidi (a)

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Here we present the realization of efficient and sustainable silicon‐based thermoelectric materials from nanoparticles. We employ a gas phase synthesis for the nanoparticles which is capable of producing doped silicon (Si) nanoparticles, doped alloy nanoparticles of silicon and germanium (Ge), SixGe1–x, and doped composites of Si nanoparticles with embedded metal silicide precipitation phases. Hence, the so‐called “nanoparticle in alloy” approach, theoretically proposed in the literature, forms a guideline for the material development. For bulk samples, a current‐activated pressure‐assisted densification process of the nanoparticles was optimized in order to obtain the desired microstructure. For thin films, a laser annealing process was developed. Thermoelectric transport properties were characterized on nanocrystalline bulk samples and laser‐sintered‐thin films. Devices were produced from nanocrystalline bulk silicon in the form of p–n junction thermoelectric generators, and their electrical output data were measured up to hot side temperatures of 750 °C. In order to get a deeper insight into thermoelectric properties and structure forming processes, a 3D‐Onsager network model was developed. This model was extended further to study the p–n junction thermoelectric generator and understand the fundamental working principle of this novel device architecture. Gas phase synthesis of composite nanoparticles; nanocrystalline bulk with optimized composite microstructure; laser‐annealed thin film.

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“…A higher resolution allows a better structural analysis of sample properties, e.g., grain boundaries in multicrystalline solar cells [2] or while evaluating the emitter layer process homogeneity [3]. To ensure that the LS beam diameter is minimal in the area under investigation, different focusing methods have been published [4]- [11].…”

Section: Introductionmentioning

confidence: 99%

Scanning Light Stimulation System With Active Focus Correction at <inline-formula> <tex-math notation="LaTeX">$\mu \hbox{m}$</tex-math> </inline-formula> Resolution for PV Applications

Bitzer

Elagin

Semtsiv

et al. 2015

IEEE J. Photovoltaics

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Recently, we introduced a scanning light stimulation system with an automated focus correction. The method is however resolution limited by a CMOS sensor used to focus the light beam. Here, to achieve a higher resolution, we enhanced the light beam focusing process by combining it with an edge detection technique. By this modification, the system resolution is improved down to a 1/e 2 -diameter of 4.3 μm, as demonstrated using an example measurement on a multicrystalline solar cell. Furthermore, it is shown that the obtained resolution is mainly limited by height variations of the positioning system, and methods to compensate these limitations are discussed using example measurements on a quantum well solar cell. Index Terms-Adaptive focusing, light stimulation (LS), optical beam-induced current (OBIC), optical beam-induced voltage (OBIV), optical beams, solar cells, spatial resolution.

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Excimer laser doping using highly doped silicon nanoparticles

Cited by 14 publications

References 28 publications

Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications

Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications

Silicon‐based nanocomposites for thermoelectric application

Scanning Light Stimulation System With Active Focus Correction at <inline-formula> <tex-math notation="LaTeX">$\mu \hbox{m}$</tex-math> </inline-formula> Resolution for PV Applications

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