Excimer lamp pumped by a triggered longitudinal discharge

Bollanti, S.; Clementi, G.; Lazzaro, P. Di; Flora, F.; Giordano, G.; Letardi, T.; Muzzi, F.; Schina, G.; Zheng, Cindy X

doi:10.1109/27.763120

Cited by 19 publications

(10 citation statements)

References 27 publications

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“…They set up an array of 3x4 discharge tubes with a total length of 4 m. Direct current discharges are attractive as they allow to couple high electrical power to the medium and thus to obtain intense UV emission [9,10]. In pulsed discharges, which are triggered by an external electrode, a peak power density of UV light up to 3 kW/cm 2 can be achieved [11] The main factor influencing the lamp lifetime is degradation of the gas mixture. Chemical reactions between halogen and metallic electrodes lead to quick changes in the composition of the working gas.…”

Section: Introductionmentioning

confidence: 99%

A Miniaturized XeCl Dielectric Barrier Discharge as a Source of Short Lived, Fast Decaying UV Radiation

Bussiahn¹,

Pipa²,

Kindel³

2010

Contrib. Plasma Phys.

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A dielectric barrier discharge (DBD) of coaxial geometry has been examined as source of intensive, short-lived UV radiation. A binary gas mixture consisting of 98% Xe + 2% Cl2 and a ternary composition of 96% Ne + 6% Xe + 0.2% HCl were investigated in the pressure range between 10 and 750 mbar. The discharge was excited by unipolar high voltage square pulses with amplitudes of 3 to 7 kV at a repetition rate of 100 Hz. UV radiation intensity is increased by combining 5 square pulses with a period of 1 μs each in one train (burst). Radiation decay on three orders of magnitude within 10 μs was obtained for both gas mixtures in burst mode. Maximum energy of the light pulse was the same for both gas mixtures and estimated as 40 nJ. It is shown that the optimum gas pressure for highest radiation intensity depends not only on gas composition but also on applied voltage and number of pulses in the train. A variation of the spectral band shape of XeCl emission during the pulse is detected.

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Section: Introductionmentioning

confidence: 99%

A Miniaturized XeCl Dielectric Barrier Discharge as a Source of Short Lived, Fast Decaying UV Radiation

Bussiahn¹,

Pipa²,

Kindel³

2010

Contrib. Plasma Phys.

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“…The scheme could be modified by inserting pulsed transformer (transformation ratio ' 3) after PD with the goal to increase amplitude of excilamp pulsed voltage. Besides, in some experiments, we used the standard scheme with storage capacity but not the Fitch scheme shown in Fig.…”

Section: Resultsmentioning

confidence: 99%

<title>Capacitive discharge excilamps with short duration of radiation pulse</title>

et al. 2001

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Power characteristics of four excilanips with short-pulse duration discharge plasma radiation have been investigated experimentally. At mixture pressure of 30 Ton the radiation pulse power density has made at ?222 nm 0.2 kW/cm2, 0.15 kW/cm2, 0.09 kW/cm2 for I-, H-and L-type excilamps, respectively. The maximal radiation pulse power density was received for modernized I-type excilamp and it has made 0.3 kW/cm2. It has been revealed that pulse radiation output is mostly determined by excilamp voltage value, discharge geometry, value ofpeaking capacitance, and gas medium density.

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“…However, the kinetic processes in the plasma responsible for the enhanced lamp performance and increased efficiency are not well understood and the principal disadvantage of excimer DBD discharge is especially their low efficiency. Furthermore in order to optimize the discharge luminance efficiency, several experimental, theoretical and detailed computer-modeling studies of the plasma kinetics in pulse-excited DBDs have been realized in the last decade [17][18][19][20][21][22][26][27][28][29][30][31][32][33][34][35][36][37][38]. It has been shown that the efficiency of excimer lamp can be increased up to 60% by employing a fast rise-time and a short pulsed voltage excitation [21,24,37,39].…”

Section: Introductionmentioning

confidence: 99%

Electrical Approach of Homogenous High Pressure Ne/Xe/HCl Dielectric Barrier Discharge for XeCl (308 nm) Lamp

Boutarfaïa

Harrache²

2011

Plasma Chem Plasma Process

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This paper reports the investigation of the excimer UV emission efficiency in Ne/Xe/HCl mixture in terms of the homogenous model of a dielectric barrier discharge. The computer model developed is based on the Ne/Xe/HCl gas mixture chemistry, the circuit and the Boltzmann equations. The effects of operating voltage, HCl concentration in the mixture as well as gas pressure on the discharge efficiency and the 172, and 308 nm photon generation, under typical experimental operating conditions, have been investigated and discussed. Calculations suggest that the overall conversion efficiency from electrical energy to VUV emission in the lamp is greater than 27%, and it will be very affected at high voltage amplitude and high gas pressure with a significant dependence on the HCl concentration in the gas mixture.

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Excimer lamp pumped by a triggered longitudinal discharge

Cited by 19 publications

References 27 publications

A Miniaturized XeCl Dielectric Barrier Discharge as a Source of Short Lived, Fast Decaying UV Radiation

A Miniaturized XeCl Dielectric Barrier Discharge as a Source of Short Lived, Fast Decaying UV Radiation

<title>Capacitive discharge excilamps with short duration of radiation pulse</title>

Electrical Approach of Homogenous High Pressure Ne/Xe/HCl Dielectric Barrier Discharge for XeCl (308 nm) Lamp

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