Exceptional Lithography Sensitivity Boosted by Hexafluoroisopropanols in Photoresists
Junjun Liu,
Dong Wang,
Yitan Li
et al.
Abstract:Advanced lithography requires highly sensitive photoresists to improve the lithographic efficiency, and it is critical, yet challenging, to develop high-sensitivity photoresists and imaging strategies. Here, we report a novel strategy for ultra-high sensitivity using hexafluoroisopropanol (HFIP)-containing fluoropolymer photoresists. The incorporation of HFIP, with its strong electrophilic property and the electron-withdrawing effect of the fluorine atoms, significantly increases the acidity of the photoresist… Show more
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