Examining the influence of W thickness on the Si-on-W Interface: A comparative metrology analysis

Valpreda, Adele; Sturm, Jacobus M.; Yakshin, Andrey E.; Woitok, Joachim; Lokhorst, Hendrik W.; Phadke, Parikshit; Ackermann, Marcelo

doi:10.1016/j.apsusc.2024.160615

Applied Surface Science

2024

DOI: 10.1016/j.apsusc.2024.160615

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Examining the influence of W thickness on the Si-on-W Interface: A comparative metrology analysis

Adele Valpreda,

Jacobus M. Sturm,

Andrey E. Yakshin

et al.

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Examining the influence of W thickness on the Si-on-W Interface: A comparative metrology analysis

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References 22 publications

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