Examining the Desirable Properties of ZnSnOy by Annealing Treatment with a Real-Time Observation of Resistivity
Aitkazy Kaisha,
David Caffrey,
Ardak Ainabayev
et al.
Abstract:In this report, 38 nm-thick amorphous zinc−tin oxide (a-ZTO) films were deposited by radio frequency magnetron cosputtering. a-ZTO films were annealed by in situ monitoring of the sheet resistance improvements during the annealing process. A sharp drop in the slope of the sheet resistance curve was observed. The activation energies for the sheet resistance slope were calculated. The activation energy of the reaction for a sharp drop in the slope is much higher than the activation energy for the rest of the slo… Show more
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