Examination of ion-induced Auger electron spectra of Ti, Cr and Co in a mass-selecting Focused Ion Beam with a gold–silicon liquid metal source

Parvaneh, Hamed; Hull, R.

doi:10.1016/j.vacuum.2014.08.012

Cited by 4 publications

(1 citation statement)

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“…Pereyaslavtsev and Naumkin [70] recently reported about IAE spectroscopy on thin film aluminium samples performed on crossbeam instruments 2 . Other IAE spectroscopy studies used various ion beams from noble gases over silicon to heavy gold beams with energies from several 100 keV down to 10 keV [71][72][73][74]. For a He + ion beam, the Auger emission process dominantly occurs at very low energies of a few 100 eV [13,14,75].…”

Section: Ion-induced Auger Electron Spectroscopymentioning

confidence: 99%

Highest resolution chemical imaging based on secondary ion mass spectrometry performed on the helium ion microscope

Audinot¹,

Philipp²,

Castro³

et al. 2021

Rep. Prog. Phys.

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This paper is a review on the combination between Helium Ion Microscopy (HIM) and Secondary Ion Mass Spectrometry (SIMS), which is a recently developed technique that is of particular relevance in the context of the quest for high-resolution high-sensitivity nano-analytical solutions. We start by giving an overview on the HIM-SIMS concept and the underlying fundamental principles of both HIM and SIMS. We then present and discuss instrumental aspects of the HIM and SIMS techniques, highlighting the advantage of the integrated HIM-SIMS instrument. We give an overview on the performance characteristics of the HIM-SIMS technique, which is capable of producing elemental SIMS maps with lateral resolution below 20 nm, approaching the physical resolution limits, while maintaining a sub-nanometric resolution in the secondary electron microscopy mode. In addition, we showcase different strategies and methods allowing to take profit of both capabilities of the HIM-SIMS instrument (high-resolution imaging using secondary electrons and mass filtered secondary sons) in a correlative approach. Since its development HIM-SIMS has been successfully applied to a large variety of scientific and technological topics. Here, we will present and summarise recent applications of nanoscale imaging in materials research, life sciences and geology.

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Section: Ion-induced Auger Electron Spectroscopymentioning

confidence: 99%

Highest resolution chemical imaging based on secondary ion mass spectrometry performed on the helium ion microscope

Audinot¹,

Philipp²,

Castro³

et al. 2021

Rep. Prog. Phys.

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Roadmap for focused ion beam technologies

Höflich,

Hobler,

Allen

et al. 2023

Applied Physics Reviews

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The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion–solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.

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