“…These algorithms include principal component analysis (PCA) and linear discriminate analysis (LDA), etc. However, the linear solutions may lead to losing the nonlinear properties of the original data [10][11][12]. Unlike the linear eigenvector-based feature extraction algorithms, LLE preserves local topology of high-dimensional data in the reduced space.…”
Section: Supervised Locally Linear Embedding (Slle)mentioning
confidence: 99%
“…The challenge is that it is not easy to determine the most distinguished features. One of the most popular data mining methods, principal component analysis (PCA) and its derivative algorithms, have been proved to be a useful tool for feature reduction and extraction [11]. However, their main limitation lies in their ability to capture the nonlinear properties of the original data [12][13][14].…”
“…These algorithms include principal component analysis (PCA) and linear discriminate analysis (LDA), etc. However, the linear solutions may lead to losing the nonlinear properties of the original data [10][11][12]. Unlike the linear eigenvector-based feature extraction algorithms, LLE preserves local topology of high-dimensional data in the reduced space.…”
Section: Supervised Locally Linear Embedding (Slle)mentioning
confidence: 99%
“…The challenge is that it is not easy to determine the most distinguished features. One of the most popular data mining methods, principal component analysis (PCA) and its derivative algorithms, have been proved to be a useful tool for feature reduction and extraction [11]. However, their main limitation lies in their ability to capture the nonlinear properties of the original data [12][13][14].…”
“…6 Neural networks have been effectively utilised in characterising material processes, 7 capturing relationships between multiparameterised input patterns and material characteristics, 5,6 and constructing a calibration model of plasma diagnosis. 8 A principal component analysis (PCA) reduced OES was also used for neural network prediction of film properties. 9 An optimised neural network model was reported by combining OES, PCA, neural network and genetic algorithm.…”
A new technique to monitor plasma processes is presented. An autocorrelated neural time series (A-NTS) network was used to model ion energy distribution (IED). The ion energy data were collected during a deposition of silicon nitride films in a SiH 4 -NH 3 inductively coupled plasma. A backpropagation neural network was used to build IED model. Prediction performance of A-NTS model was evaluated as a function of training tolerance as well as a detection sensitivity. The A-NTS models demonstrated detection sensitivities high enough to detect plasma faults. Maximum sensitivity of A-NTS models obtained was more than 55% for all fault cases. Optimised A-NTS models yielded the prediction errors of 1?41 and 2?18% for 80 and 60% IED respectively. The presented technique can be applied to monitor any kinds of plasma faults and is expected effective particularly to those faults sensitive to ion bombardment variations.
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