2008
DOI: 10.1063/1.2937086
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Evolution of the optical properties of Si nanoparticles embedded in SiO2 as function of annealing conditions

Abstract: The dielectric function of Si nanoparticles embedded in silica has been determined from spectroscopic ellipsometry and photothermal deflexion spectroscopy from 0.7to6eV. The influence of crystalline fraction and diameter of the nanoparticles on their optical properties has been investigated. Above 4nm of diameter, the nanoparticles presented a dielectric function similar to that of fine grained polycrystalline Si (poly-Si) at photon energy higher than 2eV, with the well marked structures associated with the E1… Show more

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Cited by 21 publications
(10 citation statements)
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“…The above results can explain experimental observations, that a phase change from amorphous to crystalline nanoparticles is observed at annealing T ∼ 1150 • C [19,20,21,22,23,24]. This explanation is based on the experimental observation that the size of nanoparticles grow with T [24].…”
Section: Disorder/order Phase Transition In Si Nanoparticlessupporting
confidence: 57%
“…The above results can explain experimental observations, that a phase change from amorphous to crystalline nanoparticles is observed at annealing T ∼ 1150 • C [19,20,21,22,23,24]. This explanation is based on the experimental observation that the size of nanoparticles grow with T [24].…”
Section: Disorder/order Phase Transition In Si Nanoparticlessupporting
confidence: 57%
“…Results from Energy Filtered Transmission Electron Microscopy (EFTEM) and Dark-Field Transmission Electron Microscopy (DFTEM) on Si-rich SiO x show that Si nanoparticles start to form at 1000 • C [28,29,24,25,30,27]. At this temperature they are all amorphous, while at 1100 • C about one third become crystalline.…”
Section: Resultsmentioning
confidence: 99%
“…This assumption is in keeping with most experimental observations [15,16,[21][22][23]. Let the size distribution fulfill the above relation, and insert the probability for a discrete radius into Eq.…”
Section: Numerical Simulation and Analysismentioning
confidence: 89%