We used amorphous silicon oxide (a‐Si1–xOx:H) and microcrystalline silicon oxide (µc‐Si1–xOx:H) as buffer layer and p‐type emitter layer, respectively, in n‐type silicon hetero‐junction (SHJ) solar cells. We proposed to insert a thin (2 nm) intrinsic amorphous silicon (a‐Si:H) thin film between the thin (2.5 nm) a‐Si1–xOx:H buffer layer and the p‐layer to form a stack buffer layer of a‐Si:H/a‐Si1–xOx:H. As a result, a high open‐circuit voltage (VOC) and a high fill factor (FF) were obtained at the same time. Finally, a high efficiency of 19.0% (JSC = 33.46 mA/cm2, VOC = 738 mV, FF = 77.0%) was achieved on a 100 μm thick polished wafer using the stack buffer layer.
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