2023
DOI: 10.1016/j.apsusc.2022.155046
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Evolution of surface properties of titanium oxide thin films

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Cited by 7 publications
(7 citation statements)
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“…Previous work investigating titania thin film synthesis from reactive sputtering techniques has revealed that sputtering titanium under low concentrations of oxygen yields rutile films, while increased oxygen content during the sputtering process yields anatase. [23,48] Similar results have been found during flame synthesis of TiO 2 , in which case an oxygen-rich environment yields anatase while an oxygen-lean environment yields rutile. [49,50] This suggests that, at exposure times slightly shorter than those needed to form anatase in the phase diagram, oxygen availability is once again limited, leading to the formation of rutile.…”
Section: Construction Of the Laser-induced Oxidation Phase Diagramsupporting
confidence: 72%
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“…Previous work investigating titania thin film synthesis from reactive sputtering techniques has revealed that sputtering titanium under low concentrations of oxygen yields rutile films, while increased oxygen content during the sputtering process yields anatase. [23,48] Similar results have been found during flame synthesis of TiO 2 , in which case an oxygen-rich environment yields anatase while an oxygen-lean environment yields rutile. [49,50] This suggests that, at exposure times slightly shorter than those needed to form anatase in the phase diagram, oxygen availability is once again limited, leading to the formation of rutile.…”
Section: Construction Of the Laser-induced Oxidation Phase Diagramsupporting
confidence: 72%
“…Other techniques, such as spray pyrolysis or reactive sputtering, show promise in scalable crystalline film synthesis, but typically require uniform heating of the substrate. [22,23] Consequently, these processes forgo temporal and spatial control of the heating profile, limiting the reaction timescales that can be studied and restricting the ability to explore a wide range of tuning conditions in a rapid manner. Consequently, development of a high-throughput and scalable synthesis technique is crucial for effectively exploring and optimizing the multidimensional parameter space inherent in thin-film materials engineering.…”
Section: Introductionmentioning
confidence: 99%
“…To compare the shape of the spectrum curves, it is necessary to perform a normalization procedure. The normalization procedure for the Ti L 2,3 spectra was described in detail in our recent work, 30 and here an analogous approach was applied for Ti L 2,3 , O K, Er M 4,5 and Yb M 5 spectra. The normalized Er M 4,5 XAS spectra ( Fig.…”
Section: Resultsmentioning
confidence: 99%
“…For detailed analysis of Ti L 2,3 lines, see ref. 30 . The maxima of the O K lines at 531, 533, 539 and 544 eV can be assigned to 1s → t 2g , 1s → e g , and 1s → a 1g ,t 1u transitions (see also ref.…”
Section: Resultsmentioning
confidence: 99%
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