Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Zhang, Ru; Huang, Chuanzhen; Wang, Jun; Feng, Shaochuan; Zhu, Hongtao

doi:10.1016/j.mssp.2020.105299

Cited by 33 publications

(13 citation statements)

References 41 publications

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“…LIPSS allows indeed for an accurate control of the physical and/or chemical properties of the laser-treated materials. In particular, in the case of wide-bandgap semiconductors (e.g., diamond [ 1 , 2 , 3 , 4 , 5 , 6 ] and SiC [ 21 , 22 ]), surface fs-laser treatments, leading to the formation of LIPSS, strongly influence the optical properties, increasing solar absorptance, in two different ways. First, LIPSS acts as a diffraction grating for the impinging photons, thus enhancing light trapping [ 23 ]; in this sense, it is crucial to ensure regular, well-defined structures uniformly distributed over the largest possible area of the treated material, aimed at minimizing the escape probability of coupled light.…”

Section: Introductionmentioning

confidence: 99%

Femtosecond-Laser Nanostructuring of Black Diamond Films under Different Gas Environments

et al. 2020

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Irradiation of diamond with femtosecond (fs) laser pulses in ultra-high vacuum (UHV) conditions results in the formation of surface periodic nanostructures able to strongly interact with visible and infrared light. As a result, native transparent diamond turns into a completely different material, namely “black” diamond, with outstanding absorptance properties in the solar radiation wavelength range, which can be efficiently exploited in innovative solar energy converters. Of course, even if extremely effective, the use of UHV strongly complicates the fabrication process. In this work, in order to pave the way to an easier and more cost-effective manufacturing workflow of black diamond, we demonstrate that it is possible to ensure the same optical properties as those of UHV-fabricated films by performing an fs-laser nanostructuring at ambient conditions (i.e., room temperature and atmospheric pressure) under a constant He flow, as inferred from the combined use of scanning electron microscopy, Raman spectroscopy, and spectrophotometry analysis. Conversely, if the laser treatment is performed under a compressed air flow, or a N2 flow, the optical properties of black diamond films are not comparable to those of their UHV-fabricated counterparts.

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Section: Introductionmentioning

confidence: 99%

Femtosecond-Laser Nanostructuring of Black Diamond Films under Different Gas Environments

et al. 2020

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“…The direction of laser polarization affects the direction of LIPSS structure, as shown in Figures 5(b) and 5(d). The self-organization model can be used to explain the relationship between laser polarization and LIPSS direction, which has been discussed in the previous paper (Zhang et al , 2021). For linearly polarized lasers, the direction of LIPSS is perpendicular to the laser polarization direction.…”

Section: Resultsmentioning

confidence: 99%

“…The influence of polarization direction on the groove characteristics Figure 5 The influence of polarization direction on the groove surface topography Figure 4(c) illustrates that the HAZ size of S\E is greater than that of S // E. This is because for S\E, the ultra hot-electron jet is ejected along the laser polarization direction, and the ultra-hot electrons escaping from outside of the grooves are mainly accelerated by the electric field of the vertically polarized light. According to the energy absorption theory of filler coefficient and anisotropy, energy is easier to be absorbed in the direction of laser polarization (Zhang et al, 2021;Ito et al, 2012). For S // E, the hot electrons jets along the parallel direction of the workpiece surface.…”

Section: The Influence Of Polarization Directionmentioning

confidence: 99%

“…The ablation threshold experiment is to determine the appropriate laser fluence and waist radius to obtain the size, shape and quality of the laser-induced topography, which lays the foundation for the study of HAR experiments. In the experiment, based on the microscopic observation, and at the same time using the functional relationship between the ablation diameter and the pulse intensity, the damage threshold of the material is derived, as shown in equation (1) (Zhang et al , 2021): …”

Section: Setup and Experimentsmentioning

confidence: 99%

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Fabrication of high-aspect-ratio grooves with high surface quality by using femtosecond laser

Zhang

Huang

Wang

et al. 2021

ILT

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Purpose The purpose of this study is to fabricate high-aspect-ratio grooves with high surface quality by femtosecond laser (FS) to improve the machinability of silicon carbide (SiC) and optimize the process parameters in micromechanical applications. Design/methodology/approach Four contrast experiments are reported to characterize the FS laser grooving process for SiC with polarization direction, crystal orientation, multi-pass scanning and z layer feed, respectively. The effects of different experimental conditions on the groove characteristics, material removal rate (MRR), aspect ratio, heat affected zone (HAZ) and surface roughness Ra are analyzed. Findings The influence of increasing laser fluence and multi-scanning pass on the groove depth is greater than on the groove width. The MRR, aspect ratio, HAZ and Ra increased with the increase of laser fluence and multi-scanning pass. The direction of laser polarization affects the direction of hot electron injection but has little effect on the material characteristics. FS laser ablation is an isotropic process and there is no obvious change in different crystal orientations. The z-layer feed can significantly increase the groove width and depth and reduce HAZ and Ra. The maximum aspect ratio of 82.67% was fabricated. Originality/value The results contribute to the understanding of the removal mechanism and reduce the friction of the microfluidic device and improve the flowability in the FS laser ablation of SiC. This paper provides suggestions for the selection of suitable process parameters and provides a wider possibility for the application of micro-texture on SiC.

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“…Regarding the LIPSS formation, many publications have dealt with processing parameters aiming to optimize their shape to utilize these features on various materials for surface patterning applications, [23][24][25][26][27][28][29][30][31] even including polarization-dependent appearance. [32][33][34][35] For this purpose, incident laser pulses perpendicular to the sample surface are commonly used. Notably, only a few references are available for the case of glancing incident, as commonly utilized for micro-fabrication.…”

Section: Introductionmentioning

confidence: 99%

A Perspective to Control Laser-Induced Periodic Surface Structure Formation at Glancing-Incident Femtosecond Laser-Processed Surfaces

Jelinek

Pfeifenberger

Pippan

et al. 2021

JOM

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The favorable combination of high material removal rate and low influence on the material beneath the ultra-short pulsed laser-processed surface are of particular advantage for sample preparation. This is especially true at the micrometer scale or for the pre-preparation for a subsequent focused ion beam milling process. Specific surface features, the laser-induced periodic surface structures, are generated on femtosecond laser-irradiated surfaces in most cases, which pose an issue for surface-sensitive mechanical testing or microstructural investigations. This work strives for an approach to enhance the surface quality of glancing-incident laser-processed surfaces on the model material copper with two distinctly different grain sizes. A new generalized perspective is presented, in which optimized parameter selection serves to counteract the formation of the laser-induced periodic surface structures, enabling, for example, grain orientation mapping directly on femtosecond laser processed surfaces.

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Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Cited by 33 publications

References 41 publications

Femtosecond-Laser Nanostructuring of Black Diamond Films under Different Gas Environments

Femtosecond-Laser Nanostructuring of Black Diamond Films under Different Gas Environments

Fabrication of high-aspect-ratio grooves with high surface quality by using femtosecond laser

A Perspective to Control Laser-Induced Periodic Surface Structure Formation at Glancing-Incident Femtosecond Laser-Processed Surfaces

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