2009
DOI: 10.1063/1.3086313
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Evolution of implantation induced damage under further ion irradiation: Influence of damage type

Abstract: The evolution of damage in silicon formed by H, He, and Si ion implantations under further ion irradiation, where the ion energy is primarily deposited into electronic excitation, has been studied at 77 K and at room temperature. For damage introduced by He or Si ion implantation, which primarily consists of vacancy and interstitial type defects, a subsequent irradiation with 110 keV protons at room temperature results in a decrease in ion channeling direct backscattering yield, while no change is observed whe… Show more

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Cited by 6 publications
(1 citation statement)
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“…1, and the major bands have been assigned their corresponding vibrations and functional groups. The broadening of the absorption bands at 1400 cm -1 and 700 cm -1 in irradiated crystal implies the relative disordering of the molecules in the damaged volume along the ion tracks in single crystal [32]. The bands in high wavenumber (3000 -3500 cm -1 ) arise mainly due to N-H stretching vibrations and at around 500 cm -1 corresponding to the δ as (N -C -N), they are also strongly affected by SHI.…”
Section: Ftir Analysismentioning
confidence: 99%
“…1, and the major bands have been assigned their corresponding vibrations and functional groups. The broadening of the absorption bands at 1400 cm -1 and 700 cm -1 in irradiated crystal implies the relative disordering of the molecules in the damaged volume along the ion tracks in single crystal [32]. The bands in high wavenumber (3000 -3500 cm -1 ) arise mainly due to N-H stretching vibrations and at around 500 cm -1 corresponding to the δ as (N -C -N), they are also strongly affected by SHI.…”
Section: Ftir Analysismentioning
confidence: 99%