Evidence of Light Guiding in Ion-Implanted Diamond

Lagomarsino, S.; Olivero, P.; Bosia, Federico; Vannoni, Maurizio; Calusi, S.; Giuntini, L.; Massi, M.

doi:10.1103/physrevlett.105.233903

Cited by 52 publications

(45 citation statements)

References 39 publications

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“…The propagation loss can be attributed to scattering and absorption from the sp 2 bonded carbon within the laser written tracks. It has been shown that fabrication of diamond using heavy ion implantation can lead to structural modifications with a smooth modulation of the real part of the refractive index 17,39 . In this study, we were unable to induce such Type I modifications, but utilizing different pulse repetition rates of the laser might potentially give access to different fabrication regimes where this becomes possible.…”

Section: Arxiv:160600170v2 [Physicsoptics] 28 Jul 2016mentioning

confidence: 99%

“…Elegant nanobeam waveguides have recently been demonstrated through either angled 15 or undercut RIE etching 16 . Alternatively, direct ion microbeam writing has been used to create shallow subsurface multimode waveguides 17 . All of these approaches are constrained to the diamond surface, require extensive material processing to the potential detriment of the diamond and are difficult to interface with optical fibers.…”

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confidence: 99%

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Inscription of 3D waveguides in diamond using an ultrafast laser

Courvoisier

Booth

Salter

2016

Applied Physics Letters

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Three dimensional waveguides within the bulk of diamond are manufactured using ultrafast laser fabrication. High intensities within the focal volume of the laser cause breakdown of the diamond into a graphitic phase leading to a stress induced refractive index change in neighboring regions. Type II waveguiding is thus enabled between two adjacent graphitic tracks, but supporting just a single polarization state. We show that adaptive aberration correction during the laser processing allows the controlled fabrication of more complex structures beneath the surface of the diamond which can be used for 3D waveguide splitters and Type III waveguides which support both polarizations.Diamond has long found use as a material with extreme mechanical properties, and is now rapidly gaining interest for photonic applications 1 . High transmission over a very large spectral window and a high refractive index are attractive for light manipulation. Diamond also acts as a stable basis for a host of color centers which are promising for quantum enhanced technologies 2,3 . The nitrogen vacancy (NV) center is proving particularly useful not just for quantum processing 4 but, also for a range of sensors with extreme sensitivity to magnetic field and temperature 5-7 . The strong Raman coefficient is effective for Raman lasers generating low cost lasing solutions at unusual wavelengths 8,9 . The high Raman coefficient is also useful for implementing solid state quantum memories, a vital component for any quantum optical technology enabling the storage and retrieval of quantum information 10 . In addition, diamond serves as an ideal platform for biophotonics due to a high level of biocompatibility 11 . The efficiency of many of these technologies would be improved by the ability to confine and route light using a network of optical waveguides 12 .Previous demonstrations of waveguiding within diamond have been based upon the principle of selectively removing regions of diamond to generate an air-diamond interface.Surface RIB waveguides have previously been fabricated using reactive ion etching (RIE) with photolithographic patterning 13,14 . Elegant nanobeam waveguides have recently been demonstrated through either angled 15 or undercut RIE etching 16 . Alternatively, direct ion microbeam writing has been used to create shallow subsurface multimode waveguides 17 . All of these approaches are constrained to the diamond surface, require extensive material processing to the potential detriment of the diamond and are difficult to interface with optical fibers. However, a different method for generating guiding structures in crystals has emerged over the past decade, whereby an ultrashort pulsed laser is used to modify the material 18 . In the majority of implementations, light is confined in regions of stress neighboring laser induced damage tracks, which is designated as waveguide based upon a Type II modification 19 . Previously this has been successfully applied to a range of crystals such as lithium niobate 20,21 , KDP 22 , KTP 23 and T...

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Section: Arxiv:160600170v2 [Physicsoptics] 28 Jul 2016mentioning

confidence: 99%

mentioning

confidence: 99%

Inscription of 3D waveguides in diamond using an ultrafast laser

Courvoisier

Booth

Salter

2016

Applied Physics Letters

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“…With the aim of exploiting the above-mentioned attracting properties, several diamond micro-fabrication methods are under study [7][8][9][10][11][12], promising to offer a viable path towards the integration of monolithic photonic devices while exploiting the broad-band transparency and high refractive index of this material. Such methods are often based on ionbeam microfabrication strategies [7,9,11,12]: possible variations of the refractive index due to structural damage during the device fabrication process must be accurately predicted to properly design the devices of interest . Moreover, with the aim of fabricating photonic devices in bulk diamond, the low-contrast refractive index modulation induced by ion implantation, instead of merely being a side effect, could play an active role in a more effective device design [12,13].…”

Section: Introductionmentioning

confidence: 99%

Complex refractive index variation in proton-damaged diamond

Lagomarsino¹,

Olivero²,

Calusi³

et al. 2012

Opt. Express

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An accurate control of the optical properties of single crystal diamond during microfabrication processes such as ion implantation plays a crucial role in the engineering of integrated photonic devices. In this work we present a systematic study of the variation of both real and imaginary parts of the refractive index of single crystal diamond, when damaged with 2 and 3 MeV protons at low-medium fluences (range: 10 15 -10 17 cm 2 ). After implanting in 125 × 125 μm 2 areas with a scanning ion microbeam, the variation of optical pathlength of the implanted regions was measured with laser interferometric microscopy, while their optical transmission was studied using a spectrometric set-up with micrometric spatial resolution. On the basis of a model taking into account the strongly non-uniform damage profile in the bulk sample, the variation of the complex refractive index as a function of damage density was evaluated. ©2012 Optical Society of America

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“…Nitrogen-Vacancy (NV) defects in particular display particularly attractive characteristics due to their individual addressability, optical spin polarization and long coherence times, even at room temperatures [2,3]. The prospect of creating all-diamond integrated photonic structures has thus triggered interest in the possibility of fabricating optical waveguides [4] and other photonic structures [5] in diamond using ion implantation to modulate its refractive index. Moreover, an accurate control of refractive index variations is mandatory in all photonic applications which are based on ion implantation [6].…”

mentioning

confidence: 99%

“…Despite this, a surprisingly small number of publications in the literature have addressed the problem of the index of refraction variation in diamond with ion irradiation [7][8][9]. Following the first systematic studies of damage-induced refractive index variation at a fixed wavelength [10] and the demonstration of waveguide fabrication in diamond with ion implantation [4], the dependence of refractive index variation upon structural damage needs to be systematically explored in a wide wavelength range for a broader spectrum of ion species and energies. In this paper, we report on the use of Variable-Angle Spectroscopic Ellipsometry [11] (VASE) integrated with optical absorption measurement to assess refractive index and extinction coefficient variations as a function of damage density.…”

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confidence: 99%

Spectroscopic measurement of the refractive index of ion-implanted diamond

et al. 2012

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We present the results of variable-angle spectroscopic ellipsometry and transmittance measurements to determine the variation of the complex refractive index of ion implanted single-crystal diamond. An increase is found in both real and imaginary parts at increasing damage densities. The index depth variation is determined in the wholeOCIS Codes: 160.4760, 120.2130Codes: 160.4760, 120. , 260.1180Codes: 160.4760, 120. , 300.1030 Single-crystal diamond has attracted considerable attention in recent years in the photonics community due to the properties of its broad range of active luminescent centers, which offer promising opportunities in quantum cryptography and quantum information processing [1]. Nitrogen-Vacancy (NV) defects in particular display particularly attractive characteristics due to their individual addressability, optical spin polarization and long coherence times, even at room temperatures [2,3]. The prospect of creating all-diamond integrated photonic structures has thus triggered interest in the possibility of fabricating optical waveguides [4] and other photonic structures [5] in diamond using ion implantation to modulate its refractive index. Moreover, an accurate control of refractive index variations is mandatory in all photonic applications which are based on ion implantation [6]. Despite this, a surprisingly small number of publications in the literature have addressed the problem of the index of refraction variation in diamond with ion irradiation [7][8][9]. Following the first systematic studies of damage-induced refractive index variation at a fixed wavelength [10] and the demonstration of waveguide fabrication in diamond with ion implantation [4], the dependence of refractive index variation upon structural damage needs to be systematically explored in a wide wavelength range for a broader spectrum of ion species and energies. In this paper, we report on the use of Variable-Angle Spectroscopic Ellipsometry [11] (VASE) integrated with optical absorption measurement to assess refractive index and extinction coefficient variations as a function of damage density. Experimental. Ion implantation was performed on single-crystal CVD diamonds produced by ElementSix. The samples have 100 crystal orientation, size 3×3×0.5 mm 3 and are classified as type IIa, with two optically polished opposite large faces. Four samples were implanted with 180 keV B ions, at the Olivetti I-Jet facilities in Arnad (Aosta, Italy). The whole upper surface of the four samples was irradiated uniformly with fluences of 10 13 , 5•10 13 , 10 14 and 5•10 14 cm -2 with an accuracy below 0.5%. Ellipsometric characterization of the samples was performed using a Woollam M2000-FI [12] variable-angle spectroscopic ellipsometer in the wavelength range from 246 to 1690 nm. For each sample, data were acquired at incidence angles of 63°, 65°, 67°, 69° and 71° with respect to the surface normal.

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Evidence of Light Guiding in Ion-Implanted Diamond

Cited by 52 publications

References 39 publications

Inscription of 3D waveguides in diamond using an ultrafast laser

Inscription of 3D waveguides in diamond using an ultrafast laser

Complex refractive index variation in proton-damaged diamond

Spectroscopic measurement of the refractive index of ion-implanted diamond

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