2013
DOI: 10.1063/1.4789455
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Evidence of current free double layer in high density helicon discharge

Abstract: This paper investigates the formation of double layer (DL) in helicon plasmas. In the experiment, argon plasma production is using the excitation of m ¼ À1 helicon mode with magnetic mirror field with high mirror ratio of $1:1.7. We have specifically used the radio frequency compensated Langmuir probe (LP) to measure the relevant plasma parameters simultaneously so as to investigate the details about the plasma production. The DL, which consists of both warm and bulk populations towards higher potential region… Show more

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Cited by 15 publications
(11 citation statements)
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“…the strength of the magnetic field, the filling gas pressure and the excitation frequency of RF power [1,2]. To find a mechanism which makes the helicon plasma source highly efficient, research has been done over the last several decades to understand helicon wave energy absorption [3][4][5][6][7][8]. Landau damping of the helicon wave is one such mechanism, observed in several experiments [2][3][4].…”
Section: Introductionmentioning
confidence: 99%
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“…the strength of the magnetic field, the filling gas pressure and the excitation frequency of RF power [1,2]. To find a mechanism which makes the helicon plasma source highly efficient, research has been done over the last several decades to understand helicon wave energy absorption [3][4][5][6][7][8]. Landau damping of the helicon wave is one such mechanism, observed in several experiments [2][3][4].…”
Section: Introductionmentioning
confidence: 99%
“…Among them, a Langmuir probe based on the saturation ion current, which is a new RFcompensated structure [17,18], is the most commonly used device to ascertain the plasma density and evaluate the electron temperature. Sahu et al [5][6][7] used an RF-compensated Langmuir probe combined with a B-dot to measure the DL in the plateau regions of the magnetic field under mirror-like magnetic field topology in a conducting cylindrical chamber. Charles [13] used retarding field energy analyzers (RFEAs) to discover the DL in a helicon plasma and the ion beam downstream of the DL.…”
Section: Introductionmentioning
confidence: 99%
“…3 presents the axial profiles of various plasma parameters, e.g., bulk plasma density (n 0 ), bulk electron temperature (T e ), warm electron density (n w ), warm electron temperature (T w ), and plasma potential (V p ) at operating pressure % 6 mTorr and RF power % 940 W. At the coil current of 15 A, the average magnetic field in the flat portion of the mirror was B 0 % 66 G. It may be noted that the position z % 0 in the figure represents the center of the second loop antenna, i.e., the RF launching site. [30][31][32] Fig. 3(a) shows the axial magnetic field for ease of reference.…”
Section: Experimental System and Diagnosticsmentioning
confidence: 99%
“…The details of LP data acquisition and robustness and accuracy of the LP data measurement; and LP analysis of the acquired data is presented elsewhere. [30][31][32][33] Fig. 2 is one of the representative LP data taken on axis, showing the various electron populations at axial location z % 6.5 cm in the axial profiles to be discussed below in Fig.…”
Section: Experimental System and Diagnosticsmentioning
confidence: 99%
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