2013
DOI: 10.1088/1748-0221/8/04/p04004
|View full text |Cite
|
Sign up to set email alerts
|

Evaporative CO2 cooling using microchannels etched in silicon for the future LHCb vertex detector

Abstract: The extreme radiation dose received by vertex detectors at the Large Hadron Collider dictates stringent requirements on their cooling systems. To be robust against radiation damage, sensors should be maintained below -20 o C and at the same time, the considerable heat load generated in the readout chips and the sensors must be removed. Evaporative CO 2 cooling using microchannels etched in a silicon plane in thermal contact with the readout chips is an attractive option. In this paper, we present the first res… Show more

Help me understand this report
View preprint versions

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
17
0

Year Published

2013
2013
2020
2020

Publication Types

Select...
6
4

Relationship

0
10

Authors

Journals

citations
Cited by 24 publications
(17 citation statements)
references
References 7 publications
0
17
0
Order By: Relevance
“…In order to fulfil this requirement and remove the expected heat load generated by the electronics mounted on the substrate (∼36 W), the novel microchannel cooling technique [9] has been chosen as baseline solution. This solution consists of nineteen 120×200 µm 2 trenches (microchannels) etched in a 260 µm thick wafer, which is then bonded to a cover silicon wafer, thus resulting in the final 400 µm thick silicon substrate.…”
Section: Coolingmentioning
confidence: 99%
“…In order to fulfil this requirement and remove the expected heat load generated by the electronics mounted on the substrate (∼36 W), the novel microchannel cooling technique [9] has been chosen as baseline solution. This solution consists of nineteen 120×200 µm 2 trenches (microchannels) etched in a 260 µm thick wafer, which is then bonded to a cover silicon wafer, thus resulting in the final 400 µm thick silicon substrate.…”
Section: Coolingmentioning
confidence: 99%
“…A proof of principle microchannel prototype was produced and CO 2 in a 2-phase stable condition was successfully circulated through it during 2012 [7]. The prototype was made by bonding a 760 µm silicon wafer with the etched channels to a 5 mm Pyrex plate (Fig.…”
Section: Microchannel Studies 31 First Prototypementioning
confidence: 99%
“…This minimises the thermally induced stress on the module. Tests with heaters glued on a prototype substrate have shown that the heat can be taken out with a temperature difference between heater and coolant of only 7 • C. The nominal operation temperature of the CO 2 is -35 • C and hence the sensor will stay well below the required -20 • C. More information about the microchannel cooling for the LHCb VELO upgrade can be found in [8].…”
Section: Microchannel Coolingmentioning
confidence: 99%