The chlorination and evaporation behaviors of zinc oxide in an Ar-HCl-O 2 atmosphere were observed by gravimetry. The rate of weight loss increased with increasing partial pressure of hydrogen chloride in an Ar-HCl atmosphere. When the partial pressure of hydrogen chloride in an Ar-HCl atmosphere was the same as that of chlorine in an Ar-Cl 2 atmosphere, the rate of weight loss in the Ar-HCl atmosphere was larger than that in the Ar-Cl 2 atmosphere although the chlorine content in the Ar-HCl atmosphere was half that in the Ar-Cl 2 atmosphere. From the dependence of the rate of weight loss on the partial pressure of hydrogen chloride, it was considered that the rate determining step of the reaction is the diffusion of gaseous species inside the boundary layer in the gas phase. By increasing the partial pressure of oxygen in an Ar-HCl-O 2 atmosphere, the rate of weight loss slightly increased. This tendency was similar to that in an Ar-Cl 2 -O 2 atmosphere. On the other hand, the chlorination rate of zinc oxide, estimated by assuming equilibrium of the gas phase, and the measured chlorination rates of Ar-HCl and Ar-Cl 2 gases decreased because of the decrease in partial pressure of hydrogen chloride by the oxidation of HCl gas. It is considered that the increase in the chlorination rate is due to the formation of the oxychloride ZnOCl together with ZnCl 2 in the oxidizing atmosphere.