2014
DOI: 10.1134/s1087659614020163
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Evaluation of the fractal dimension of sol-gel deposited oxide films by means of the power spectral density

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Cited by 16 publications
(5 citation statements)
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“…In our previous studies on the surface morphology of thin films [40], [41], a new algorithm named as roughness scaling extraction (RSE) was proposed to evaluate FD based on a single morphological image. It was found that RSE algorithm was much more accurate than the traditional algorithms including BC algorithm [42], power spectral density (PSD) algorithm [43], autocorrelation function (ACF) algorithm [44] and structure function (SF) algorithm [45]. And FD results obtained by RSE were also consistent with actual features in the surface morphologies of alumina thin films.…”
Section: Introductionmentioning
confidence: 53%
“…In our previous studies on the surface morphology of thin films [40], [41], a new algorithm named as roughness scaling extraction (RSE) was proposed to evaluate FD based on a single morphological image. It was found that RSE algorithm was much more accurate than the traditional algorithms including BC algorithm [42], power spectral density (PSD) algorithm [43], autocorrelation function (ACF) algorithm [44] and structure function (SF) algorithm [45]. And FD results obtained by RSE were also consistent with actual features in the surface morphologies of alumina thin films.…”
Section: Introductionmentioning
confidence: 53%
“…For 2D PSD analysis, the AFM data used have scan dimensions of 2.5 x 2.5 μm, 1 x 1 μm, and 250 x 250 nm to cover different surface features with different resolutions and in different but overlapped frequency domains (Figure ). From these plots, we can determine the consistent, dominant surface features from spikes in the spectral response, isotropic behavior of the surface and roughness exponent from the slope, surface roughness from the area under the PSD function, and fractal dimensions at difference length scales . These characteristics collectively describe the surface topography, spatial distribution, spatial length scale, and size of dominating features that contribute to surface roughness .…”
Section: Results and Discussionmentioning
confidence: 99%
“…From these plots, we can determine the consistent, dominant surface features from spikes in the spectral response, isotropic behavior of the surface and roughness exponent from the slope, surface roughness from the area under the PSD function, and fractal dimensions at difference length scales. 35 These characteristics collectively describe the surface topography, spatial distribution, spatial length scale, and size of dominating features that contribute to surface roughness. 32 The calculated PSD plots are shown in Figure 5 at three different length scales: microscale (2 μm to 50 nm), sub-microscale (1 μm to 10 nm), and nanoscale (200−1 nm).…”
Section: Resultsmentioning
confidence: 99%
“…Appendix A.1 Herrasti P. et al [120] 1992 TR 2.5 ± 0.1 (Au) 100 nm 10 nm 2.7 ± 0.1 (Vapour) Krim J. et al [14] 1993 TR 2.47-2.98 10 µm 10 nm Ba L. et al [121] 1995 BC 1.67-1.83 --Strizhak P. E. [122] 1995 other 1.49-2 10 mm 0.02 mm Ba L. et al [123] 1996 BC 1.67-1.78 --Chen Z. W. et al [124] 2001 BC 1.52-1.75 --Sun X. et al [125] 2002 BC Gold, polycrystalline copper sputter deposition STM Herrasti P. et al [120] 1992 Au electrochemically STM Krim J. et al [14] 1993 iron ion-beam erosion STM Ba L. et al [121] 1995 Ge-22% Au deposited & annealed TEM Strizhak P. E. [122] 1995 CuS chemical synthesis OM Ba L. et al [123] 1996 Ge-5% Au deposited & annealed TEM Chen Z. W. et al [124] 2001 Au/Ge evaporation& annealed TEM Sun X. et al [125] 2002 ZnO reactive sputtering AFM Fang T. H. et al [75] 2003 ZnO magnetron sputtering AFM Wang Y. et al [37] 2004 Cu-W magnetron sputtering AFM Catalan G. et al [126] 2008 multiferroic BiFeO 3 PLD PFM Raoufi D. [127] 2010 ITO EBE AFM Raoufi D. [88] 2010 SiO 2 -SiO 2 polymeric sol-gel AFM Chen Z. W. et al [128] 2010 SiO 2 PLD SEM Miyata S. et al [129] 2011 MgO Ion beam assisted deposition AFM Gao H. J. et al [130] 2011 C60-polymer ionized-cluster-beam TEM Chen Z. W. et al [61] 2011 Pd/Ge evaporation & annealing TEM Feng F. et al [5] 2012 alumina/Hastelloy C276 Ion beam assisted deposition AFM Ponomareva A. A. et al [131] 2014 Oxide sol-gel deposited AFM Hou L. et al [132] 2014 Pd/Ge thermal evaporation TEM Haniam P. et al [79] 2014 cobalt oxides laser CVD SEM Kong Y. L. et al [133] 2014 TsNiPc spin-coating & annealed AFM Park K. et al [134] 2014 ferroelectric copolymer spin-coating PFM Arman A. et al [135] 2015 copper magnetron sputtering AFM Yadav R. P. et al [20] 2015 BaF 2 EBE AFM Yadav R. P. et al…”
Section: Abbreviations Appendix Amentioning
confidence: 99%