Evaluation of the effect of mask-blank flatness on CDU and DOF in high-NA systems

Lee, Christopher; Chang, Chia‐Lun; Chin, Tomas; Lu, Richard; Fan, Steven; Chen, Derek; Chan, Grace; Huang, Torey

doi:10.1117/12.746614

SPIE Proceedings

2007

DOI: 10.1117/12.746614

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Evaluation of the effect of mask-blank flatness on CDU and DOF in high-NA systems

Christopher Lee

Chia‐Lun Chang

Tomas Chin

et al.

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Evaluation of the effect of mask-blank flatness on CDU and DOF in high-NA systems

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