2022
DOI: 10.1016/j.micron.2022.103303
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Evaluation of TEM methods for their signature of the number of layers in mono- and few-layer TMDs as exemplified by MoS2 and MoTe2

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Cited by 6 publications
(5 citation statements)
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“…77−79 The thicknesses of the emerging annealed crystals were obtained from EELS by the log-ratio method. 80,81 For annealing experiments, a side entry Double Tilt Heating Holder Model 652-Ta (Gatan Inc.) and a FEI NanoEx-i/v TEM holder were used (www.fei.com/nanoex). The transition temperature for the annealing experiments was measured directly from the FEI TEM holder under vacuum conditions (7 × 10 −9 bar).…”
Section: Materials and Instrumentationmentioning
confidence: 99%
See 1 more Smart Citation
“…77−79 The thicknesses of the emerging annealed crystals were obtained from EELS by the log-ratio method. 80,81 For annealing experiments, a side entry Double Tilt Heating Holder Model 652-Ta (Gatan Inc.) and a FEI NanoEx-i/v TEM holder were used (www.fei.com/nanoex). The transition temperature for the annealing experiments was measured directly from the FEI TEM holder under vacuum conditions (7 × 10 −9 bar).…”
Section: Materials and Instrumentationmentioning
confidence: 99%
“…The energy resolution in the EELS experiments was determined to be 0.6 eV from the full width at half-maximum of the zero-loss peak, measured under vacuum. If not stated otherwise in the corresponding spectra, for all presented core-loss EELS signals, the background was treated with a power-law model, which has been shown to give good results in previous studies of the analyzed elemental core-loss edges. The thicknesses of the emerging annealed crystals were obtained from EELS by the log-ratio method. , …”
Section: Materials and Instrumentationmentioning
confidence: 99%
“…Experimentally determined image parameters were used as input parameters, and noise following the Poisson statistics was added to the images to account for the finite electron dose. Due to the utilized magnification during the acquisition, no effects of the camera MTF have to be included in the simulations …”
Section: Methodsmentioning
confidence: 99%
“…Due to the utilized magnification during the acquisition, no effects of the camera MTF have to be included in the simulations. 75 2.3. Computational Details.…”
Section: Tem Experiments and Analysismentioning
confidence: 99%
“…The discussed peak separation, evaluated from the defect statistics in a single plan-view HRTEM image, allows to identify the number of layers in the sample. As explained in, 41 without exploiting the defect statistics only monolayer MoS 2 can be identified.…”
mentioning
confidence: 99%