Abstract:We describe here the application of photoconductive frequency resolved spectroscopy to determine excess carrier lifetime distributions and carrier kinetics in SIMOX (separation by implanting oxygen) material. In order to evaluate the influence of the implant and anneal processes on the quality of the silicon overlayer we have also analyzed unprocessed bulk silicon, high temperature annealed bulk silicon and as-implanted SIMOX material. Our photoconductive frequency resolved spectroscopy results reveal that the… Show more
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