Abstract:An evaluation method based on multifunctional scanning probe microscopy enables the nanoscale observation of power semiconductor devices. Herein, we report the results of the evaluation of a power device performed by frequency-modulation atomic force microscopy, Kelvin probe force microscopy (KPFM), and scanning capacitance force microscopy (SCFM). The evaluation sample is a commercially available silicon carbide Schottky barrier diode (SiC-SBD) with a breakdown voltage of 1200 V. In this study, we focus on th… Show more
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