Evaluation of Ru–Ti Electrode-Based TSM Langasite Resonators for High-Temperature Applications

Shah, Ismaeel; Saha, Tridib

doi:10.1109/tuffc.2022.3145496

Cited by 2 publications

(1 citation statement)

References 35 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Finally, it resulted in the total degradation of the finger electrodes after long-term thermal loading at 800 • C in air. However, the observed oxidation and formation of Ru or RuO 2 grains do not necessarily imply a severe loss in function, since both pure Ru and RuO 2 possess sufficiently low electrical resistivity and are used as material for electrodes [19,20].…”

Section: Discussionmentioning

confidence: 99%

Study of the Long-Term High-Temperature Structural Stability of RuAl Electrodes for Microelectronic Devices

Seifert,

Leszczynska,

Gemming

2024

Materials

View full text Add to dashboard Cite

The high-temperature stability of RuAl-based electrodes for application in microelectronic devices is analyzed for long-term duration. The electrodes are prepared on Ca3TaGa3Si2O14 (CTGS) substrates using SiO2 and Al-N-O cover and barrier layers as oxidation protection. The samples are annealed at 600, 700, or 800 °C in air for 192 h. Minor degradation is observed after thermal loading at 700 °C. The annealing at 800 °C for 192 h leads to a partial oxidation of the Al in the extended contact pad and to a complete oxidation of the Al within the structured interconnect electrodes. The different degradation of the interconnect electrodes and the contact pads is caused by their different lateral dimensions. In summary, long-term high-temperature stability is demonstrated up to at least 700 °C in air. Less oxidizing atmospheres should allow the application at higher temperatures and for a significantly longer duration.

show abstract

Section: Discussionmentioning

confidence: 99%