Abstract:The required voltage and current to produce a desired displacement with a MEMS electrothermal actuator can vary considerably between devices due to manufacturing process variation. This article presents a case for using resistance change divided by the ambient temperature resistance (ΔR/R0) as the quantity sensed in a feedback system to control the displacement, and avoid either melting the actuator with over drive, or not producing the desired actuation with under drive. The electrical resistance of a MEMS th… Show more
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