Evaluation of Piezoresistive Effects for Carbon Nanowire using MEMS Actuators

Abstract

This research develops Electrostatic Actuated NAno Tensile testing devices (EANATs) to evaluate mechanical and electrical properties of carbon nanowires fabricated by focus ion beam assisted chemical vapor deposition (FIB-CVD). This research measured I-V characteristics of carbon nanowires, with diameters ranging from 88 nm to 129 nm, under tensile loading in order to evaluate the gauge factor of nanowires. The averaged gauge factor of 0.7 is lower than that of hydrogenated amorphous C films. Discussion of the mechanical and electrical properties of the nanowires is made from scanning electron microscope-energy dispersive x-ray spectrometer (SEM-EDX) and scanning transmission electron microscope (STEM) observations.

Highly sensitive hydrogen sensor based on suspended, functionalized single tungsten nanowire bridge

“…(b) SIM image of microelectrodes and suspended single tungsten nanowire bridge with bonded aluminum wire. tigate material properties of them such as electrical resistivity [22], Young's modulus [23] and piezoresistivity [24].…”

Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor

“…FIB is also used to fabricate 3-dimensional nanostructures [3][4][5]. Efforts have been undertaken to investigate material properties of FIB induced nanostructures such as electrical resistivity [6], Young's modulus [7] and piezoresistivity [8]. More recently, FIB has found its usage to make electrical contact between dispersed nanowires on substrate and electrodes [9].…”