Evaluation of Optical Inspection Methods for Non-Destructive Assessment of Embedded Microstructures and Defects in Ceramic Materials

Abstract

The future ceramic micro processing based on tape stacking requires the development of inspection systems to perform high-resolution in-process quality control of embedded manufactured cavities, metal structures and defects. This paper presents non-destructive techniques for monitoring processes and controlling the different steering parameters. Results are shown for optical coherence tomography (OCT), IR-transmission and reflection measurement, and X-ray micro computed tomography. Suitable working conditions are analyzed to improve the detection performance.