Evaluation of mechanical properties in nanometer scale using AFM-based nanoindentation tester

Tracking of Triangular References Using Signal Transformation for Control of a Novel AFM Scanner Stage

“…To design the controller for each axis, we use affine parametrization method [51]. Using the transfer functions obtained in Section VI-B for the piezoelectric outputs as the plant and considering all poles of the plant undesirable, affine parametrization method leads to the following poles assignment equation: (12) where and are numerator and denominator polynomials of the plant transfer function, respectively, is the desired characteristic polynomial after closing the damping loop, and and are the numerator and denominator polynomials of the damping compensator, respectively. Since and are of order three, selecting degree of two for the compensator polynomials and and degree of five for the desired polynomial lead to a unique solution for compensator.…”

“…The invention of scanning probe microscopy (SPM) is one of the revolutionary events in nanoscience and nanotechnology [3]- [5]. SPMs promise breakthroughs in areas such as nanometrology [6]- [9], nanolithography [10], [11], material science [12], [13], high-density data storage systems [14]- [16], and nano-fabrication [17]. SPMs are capable of generating 3-D maps of material surfaces on an atomic scale.…”

Signal Transformation Approach to Tracking Control With Arbitrary References

“…Such applications include scanning probe microscopy [3]- [5], nanometrology [6]- [9], nanolithography [10], [11], material science [12], [13], high-density data storage systems [14]- [16], and nano-fabrication [17]. Capacitive and inductive sensors are commonly used in nanopositioning systems due to their capability of providing simple solution for non-contact, high-resolution measurement.…”

Vibration Responses of Atomic Force Microscope Cantilevers

“…The atomic force microscope (AFM) cantilever was developed for producing high-resolution images of surface structures of both conductive and insulating samples in both air and liquid environments (Takaharu et al, 2003 ;Kageshima et al, 2002 ;Kobayashi et al, 2002 ;Yaxin & Bharat, 2007). In addition, the AFM cantilever can be applied to nanolithography in micro/nano electromechanical systems (MEMS/NEMS) (Fang & Chang, 2003) and as a nanoindentation tester for evaluating mechanical properties (Miyahara, et al, 1999). Therefore, it is essential to preciously calculate the vibration response of AFM cantilever during the sampling process.…”