Evaluation of glass materials by using the line-focus-beam ultrasonic-material-characterization system

Kushibiki, J.; Arakawa, Mototaka; Ohashi, Yuji; Okabe, R.

doi:10.1109/tuffc.2005.1504001

Cited by 11 publications

(8 citation statements)

References 32 publications

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“…We proposed an evaluation method of glass materials using ultrasonic microspectroscopy (UMS) technology [1][2][3]. UMS technology was previously applied to characterization of silica glasses, and it was found that acoustic properties, viz.…”

Section: Introductionmentioning

confidence: 99%

Evaluation of synthetic silica glasses by the ultrasonic microspectroscopy technology

Arakawa

Shimamura

Kushibiki

2009

2009 IEEE International Ultrasonics Symposium

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Ultrasonic microspectroscopy technology was applied to characterization of synthetic silica glasses. Acoustic properties (longitudinal and shear velocities, leaky surface acoustic wave velocity, and density), fictive temperature T f , chlorine concentration C(Cl), and OH concentration C(OH) were measured, and related relationships among their properties were discussed. The longitudinal velocities in the acoustic properties have the highest sensitivities of 5.93°C/(m/s), -202 wtppm/(m/s), and -31 wtppm/(m/s), with resolutions of 0.6°C, 20 wtppm, and 3.1 wtppm, to T f , C(Cl), and C(OH), respectively. The variations in the acoustic velocities due to T f , C(Cl), and C(OH) are mainly caused by variations in elastic constants, except for shear velocity due to C(OH).

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Section: Introductionmentioning

confidence: 99%

Evaluation of synthetic silica glasses by the ultrasonic microspectroscopy technology

Arakawa

Shimamura

Kushibiki

2009

2009 IEEE International Ultrasonics Symposium

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“…5) However, it has often been seen that the measurement precision of LSAW velocities decreases for certain glass materials including silicate glasses. [13][14][15] This experience is considered, in the measurement principle, to be closely related to waveform attenuation of the VðzÞ curves. 1,16,17) Such deterioration in measurement precision is a serious problem in the evaluation of ultra-low expansion glasses such as TiO 2 -SiO 2 glass and Li 2 O-Al 2 O 3 -SiO 2 glass ceramic.…”

Section: Introductionmentioning

confidence: 99%

Improvement of Velocity Measurement Accuracy of Leaky Surface Acoustic Waves for Materials with Highly Attenuated Waveform of the V(z) curve by the Line-Focus-Beam Ultrasonic Material Characterization System

Ohashi

Arakawa²,

Kushibiki³

2006

jjap

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Measurement accuracies of leaky surface acoustic wave (LSAW) velocities for materials with highly attenuated waveforms of VðzÞ curves obtained by the line-focus-beam ultrasonic material characterization (LFB-UMC) system are investigated. Theoretical investigations were carried out and experiments were performed for TiO 2 -SiO 2 glass (C-7972), Li 2 O-Al 2 O 3 -SiO 2 glass ceramic (Zerodur Ò ), and (111) gadolinium gallium garnet (GGG) single crystal as specimens. Waveform attenuations of VðzÞ curves for C-7972 and Zerodur Ò are greater than those for the (111) GGG single crystal. Frequency dependences of the waveform attenuations were calculated for each specimen by considering the propagation attenuation of LSAWs. The theoretical results revealed that the waveform attenuation dominantly depends upon the acoustic energy loss due to the water loading effect on the specimen surface, and that the waveform attenuation becomes smaller with decreasing frequency. Significant improvement of the measurement precision of LSAW velocities was demonstrated for each specimen using three LFB ultrasonic devices with different curvature radii R of the cylindrical acoustic lenses: R ¼ 2:0 mm at 75 MHz, R ¼ 1:5 mm at 110 MHz, and R ¼ 1:0 mm at 225 MHz; for C-7972, the precisions were improved from AE0:0053% at 225 MHz to AE0:0020% at 75 MHz.

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“…2) This system has also been applied successfully to property analysis and evaluation of glass materials, including homogeneity evaluation of silicate glass substrates for SAW devices, 3,4) investigation of relationships between acoustic properties and impurity concentrations in acoustic fibers, 5) evaluation of optical fiber preform, 6) evaluation of silica (SiO 2 ) glasses and their production process, 7,8) and study of highly accurate evaluation methods for glass materials. 9) Most recently, system development of extreme ultraviolet lithography (EUVL), a future key technology for mass producing Super-LSI circuits with a line width of less than 45 nm, has been conducted in the semiconductor nanoelectronics. The most important issue to realize the EUVL system is to develop ultra-low-expansion glasses as the basic substrate material suitable for reflective optics and photomask blanks, having a coefficient of thermal expansion (CTE) within AE5 ppb/K at the desired operating temperature (for example, 22 AE 3 C for EUVL mask blanks).…”

Section: Introductionmentioning

confidence: 99%

A Super-Precise CTE Evaluation Method for Ultra-Low-Expansion Glasses Using the LFB Ultrasonic Material Characterization System

Kushibiki

Arakawa

Ohashi

et al. 2005

Jpn. J. Appl. Phys.

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A super-precise method of evaluating the coefficient of thermal expansion (CTE) of ultra-low-expansion glasses for future extreme ultra-violet lithography (EUVL) systems was developed using the line-focus-beam ultrasonic material characterization (LFB-UMC) system. Evaluation was demonstrated for two commercial glasses, TiO2-SiO2 glass (C-7971) and Li2O-Al2O3-SiO2 glass ceramic (Zerodur). For the C-7971 specimens, the sensitivity and resolution in the velocity measurement of leaky surface acoustic waves (LSAWs) for the CTE were estimated to be 4.40 (ppb/K)/(m/s) and ±0.77 ppb/K for ±2σ (σ: standard deviation). LSAW velocity differences caused by different TiO2 concentrations and distributions or striae in each specimen were successfully detected and evaluated. For the Zerodur specimens, LSAW velocity differences associated with the chemical compositions and crystallization conditions were observed among different ingots and specimens. This ultrasonic method is expected to be an extremely useful and effective CTE evaluation technology and to contribute to improving and developing EUVL-grade glass materials.

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Evaluation of glass materials by using the line-focus-beam ultrasonic-material-characterization system

Cited by 11 publications

References 32 publications

Evaluation of synthetic silica glasses by the ultrasonic microspectroscopy technology

Evaluation of synthetic silica glasses by the ultrasonic microspectroscopy technology

Improvement of Velocity Measurement Accuracy of Leaky Surface Acoustic Waves for Materials with Highly Attenuated Waveform of the V(z) curve by the Line-Focus-Beam Ultrasonic Material Characterization System

A Super-Precise CTE Evaluation Method for Ultra-Low-Expansion Glasses Using the LFB Ultrasonic Material Characterization System

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