2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2024
DOI: 10.1109/asmc61125.2024.10545510
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Evaluation of different metal preclean conditions for MOL for 2nm and beyond: Topic/category: AEPM : Advanced Equipment Processes and Materials

Samuel Munnangi,
Andrew Simon,
Oscar Van der Straten
et al.
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