Abstract:We are developing an ultra high precision soft X-ray telescope. The design of the telescope is a normal incident one for 13.5nm band using Mo/Si multilayers. Two ideas are introduced. One is the optical measurement system in order to monitor the precision of the optics system. The other is the adaptive optics system with a deformable mirror.Using an X-ray-optical separation filter, we can always monitor the deformation of the optics by optical light. With this information, we can control the deformable mirror … Show more
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