Evaluation and implementation of TeraScan reflected light die-to-database inspection mode for 65nm design node process

Hsu, Luke; Ho, C.H.; Lin, Chien-Cheng; Hsu, Vincent; Chen, Ellison; Yu, Paul K. L.; Son, Kong

doi:10.1117/12.632108

SPIE Proceedings

2005

DOI: 10.1117/12.632108

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Evaluation and implementation of TeraScan reflected light die-to-database inspection mode for 65nm design node process

Luke Hsu

C.H. Ho

Chien-Cheng Lin

et al.

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Evaluation and implementation of TeraScan reflected light die-to-database inspection mode for 65nm design node process

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