Evaluation and criterion determination of the low- k thin film adhesion by the surface acoustic waves with cohesive zone model

Xiao, Xia; Qi, Haiyang; Sui, Xiaole; Kikkawa, Takamaro

doi:10.1016/j.apsusc.2016.12.005

Cited by 12 publications

(6 citation statements)

References 33 publications

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“…9, the time delay caused by the distance matches well with the propagating time of the surface acoustic waves between the two positions. By carrying out fast Fourier transform (FFT) on the detected signals 16) , the experimental dispersion curve of SiO 2 film with thickness of 1000 nm and 500 nm is obtained with the maximum frequency up to 180 MHz and 140 MHz, shown in Figs. 10(a) and 10(b), respectively.…”

Section: Experiments and Results Discussionmentioning

confidence: 99%

“…14,15) The CZM-SAW technique combined with the finite element calculation is used to determine the film adhesion criterion for judging the film adhesion quality. 16) In this study, the influence factors of the adhesion criterion are carefully studied. By calculating four kinds of film materials with different film thicknesses, the influence factors of the adhesion criterion and their impaction are revealed.…”

Section: Introductionmentioning

confidence: 99%

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Influence factors of film adhesion criterion of the nondestructive CZM-SAW technique

Xiao

Kong

2019

Jpn. J. Appl. Phys.

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Film adhesion can be determined by the surface acoustic wave (SAW) technique combined with the cohesive zone model (CZM) nondestructively and quantitatively. Moreover, the CZM-SAW technique can judge the adhesion quality quantitatively by the adhesion criterion. In this study, adhesion criterions of four kinds of different film materials with a wide thickness range from 50 nm to 6000 nm are simulated to study the influence factors of film adhesion criterion determined by the CZM-SAW technique. Studying influence factors of film adhesion criterion is essential for adhesion quality judgment. In addition, the adhesion criterion deviation caused by measurement error is analyzed. Adhesion properties of six film samples are determined by the CZM-SAW technique and are judged by the adhesion criterion with considering measurement errors. This paper exhibits the unique advantage of the CZM-SAW technique, which is a complete method for characterizing the film adhesion.

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Section: Experiments and Results Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Influence factors of film adhesion criterion of the nondestructive CZM-SAW technique

Xiao

Kong

2019

Jpn. J. Appl. Phys.

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“…When a coating-substrate system is subjected to an external stimulus, such as the change in pressure load or temperature, localized sources trigger the release of energy in the form of stress waves. The stress waves propagated to the surface or interface of coatings and substrates and were recorded by different sensors [148] [149]. Using the right sensors and detection instruments, displacements of the order of picometres (10 -12 m) can be detected.…”

Section: Other Adhesion Tests Induced Acoustic Emission and Measurementsmentioning

confidence: 99%

Advances in test and measurement of the interface adhesion and bond strengths in coating-substrate systems, emphasising blister and bulk techniques

et al. 2019

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In this paper, recent advances in the minimum-destructive testing of the adhesion of coating-substrate systems are reviewed, focusing on key techniques such as micro-and nano-scale levels of indentation, scratching, laser-induced wave shock, as well as the blister and buckle approach. Along with adhesion failure tests, the latest and most extensive applications of the adhesion test methods in nano-, micro-and bulkcoating technology and the associated techniques to determine the minimum damage defects left on the coatings are discussed and their use reviewed.

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“…[16] In a homogeneous and isotropic bulk material, the wave phase velocity v depends on the material parameters: Young's modulus E, density ρ, and Poisson's ratio σ , and it is independent of the frequency f of the wave. [19,20] In the film/substrate structure, the phase velocity v of the waves depends on the film and substrate material parameters and the frequency-thickness product f h. [21,22] The surface acoustic waves are dispersive, and the dispersion phenomenon is resulted from the different SAW phase velocities in the film and substrate materials. Figure 1 illustrates the dispersion phenomenon, it shows the theoretical dispersion curve v( f h) of the SiO 2 /Si structure.…”

Section: Theoretical Backgroundmentioning

confidence: 99%

Nondestructive determination of film thickness with laser-induced surface acoustic waves

Xiao¹,

Kong²,

Qi³

et al. 2018

Chinese Phys. B

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The application of surface acoustic waves (SAWs) for thickness measurement is presented. By studying the impact of film thickness h on the dispersion phenomenon of surface acoustic waves, a method for thickness determination based on theoretical dispersion curve v( f h) and experimental dispersion curve v( f ) is developed. The method provides a series of thickness values at different frequencies f , and the mean value is considered as the final result of the measurement. The thicknesses of six interconnect films are determined by SAWs, and the results are compared with the manufacturer's data. The relative differences are in the range from 0.4% to 2.18%, which indicates that the surface acoustic wave technique is reliable and accurate in the nondestructive thickness determination for films. This method can be generally used for fast and direct determination of film thickness.

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Evaluation and criterion determination of the low- k thin film adhesion by the surface acoustic waves with cohesive zone model

Cited by 12 publications

References 33 publications

Influence factors of film adhesion criterion of the nondestructive CZM-SAW technique

Influence factors of film adhesion criterion of the nondestructive CZM-SAW technique

Advances in test and measurement of the interface adhesion and bond strengths in coating-substrate systems, emphasising blister and bulk techniques

Nondestructive determination of film thickness with laser-induced surface acoustic waves

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