Evaluating deep trench profile by Fourier Transform Infrared spectroscopy

Wang, M.; Cheng, T.S.; Chang, Chung-I; Wang, Tings

doi:10.1109/asmc.2006.1638741

The 17th Annual SEMI/IEEE ASMC 2006 Conference

DOI: 10.1109/asmc.2006.1638741

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Evaluating deep trench profile by Fourier Transform Infrared spectroscopy

M. Wang¹,

T.S. Cheng²,

Chung-I Chang³

et al.

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Evaluating deep trench profile by Fourier Transform Infrared spectroscopy

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