EUV reflectometry for thickness and density determination of thin film coatings

Döring, Stefan; Hertlein, Frank; Bayer, Armin; Mann, Klaus

doi:10.1007/s00339-012-6914-6

Cited by 16 publications

(7 citation statements)

References 15 publications

(18 reference statements)

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“…In terms of the raw reflectance, the measurements presented in this paper can be compared with the measurements at the wavelength of 12.98 nm conducted in Laser-Laboratorium Göttingen e.V 11 . using a laser-produced plasma from a gas puff target.…”

Section: Resultsmentioning

confidence: 99%

“…In the literature available to date and in the materials provided by the manufacturer, one can find a relatively complete set of scatterometer measurements of the Acktar Magic Black™ coating for selected wavelengths in the visible range (VIS) 6 , 7 . However, for the UV range, there are available only measurements of the BRDF for 193 nm in the specular plane and of the reflectance for a limited set of the incidence and scattering angles for ∼13 nm 11 . Lyman-α diffuse-reflectance characteristics of 10 different materials were discussed in Ref.…”

Section: Introductionmentioning

confidence: 99%

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Reflectance properties of the Acktar Magic Black™ coating for the radiation near the Lyman-α line of hydrogen: measurements and phenomenological model of the BRDF

Strumik,

Wardzińska,

Bzowski

et al. 2024

J. Astron. Telesc. Instrum. Syst.

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Optical surfaces of space instruments usually need to be blackened to minimize adverse effects affecting their performance in photometric, spectrometric, and imaging applications. Blackening is often obtained by application of coatings that strongly absorb the incoming photon flux and diffusively scatter the incident photons. We discuss reflectance measurements and a phenomenological model of the bidirectional reflectance distribution function (BRDF) for the Magic Black™ coating, which is a commercial product supplied by the Acktar company. The coating has a vast satellite-instrument heritage and is planned to be used in the GLOWS photometer onboard the upcoming NASA Interstellar Mapping and Acceleration Probe nmission. The reflectance measurements were conducted at ∼121.6 nm, corresponding to the Lyman-α line for hydrogen, which is important in astrophysics. This line is commonly considered a crossover between the far ultraviolet and extreme ultraviolet spectral ranges. To generate radiation in this range, a laserplasma source based on the gas-puff target was used. Six samples coated with Acktar Magic Black™ were studied in an optical system with a back-illuminated CCD camera as a detector. The measurements were used to derive the phenomenological BRDF model based on a series of analytic fits to the measurements, which makes it easily applicable in both numerical simulations and manual calculations. The formulas provide an approximation in the full hemispheric domain, i.e., both for the in-specular-plane and out-of-specular-plane behaviors of the BRDF for the coating. A similar fit-based phenomenological model is also described for the visible range (the wavelength of 532 nm) as a byproduct of our analysis for the UV range.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Reflectance properties of the Acktar Magic Black™ coating for the radiation near the Lyman-α line of hydrogen: measurements and phenomenological model of the BRDF

Strumik,

Wardzińska,

Bzowski

et al. 2024

J. Astron. Telesc. Instrum. Syst.

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“…Optical reflectometry is a method which analyzes the reflectance spectra of a sample to measure characteristics such as optical constants and thin film thickness and is a well-known and powerful technique for measuring film thickness quickly in several industries [ 12 , 74 , 75 , 76 , 77 ]. There are extensive variants of this method, which are widely available for review in the literature, but the key operating principle of this methodology is the illumination of a sample with an optical light source, detection of the reflected intensity and fitting this intensity as a function of coating thickness [ 76 ].…”

Section: Potential In-line Coating Thickness Test Methodsmentioning

confidence: 99%

Continuous In-Line Chromium Coating Thickness Measurement Methodologies: An Investigation of Current and Potential Technology

Jones

Uggalla

et al. 2021

Sensors

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Coatings or films are applied to a substrate for several applications, such as waterproofing, corrosion resistance, adhesion performance, cosmetic effects, and optical coatings. When applying a coating to a substrate, it is vital to monitor the coating thickness during the coating process to achieve a product to the desired specification via real time production control. There are several different coating thickness measurement methods that can be used, either in-line or off-line, which can determine the coating thickness relative to the material of the coating and the substrate. In-line coating thickness measurement methods are often very difficult to design and implement due to the nature of the harsh environmental conditions of typical production processes and the speed at which the process is run. This paper addresses the current and novel coating thickness methodologies for application to chromium coatings on a ferro-magnetic steel substrate with their advantages and limitations regarding in-line measurement. The most common in-line coating thickness measurement method utilized within the steel packaging industry is the X-ray Fluorescence (XRF) method, but these systems can become costly when implemented for a wide packaging product and pose health and safety concerns due to its ionizing radiation. As technology advances, nanometer-scale coatings are becoming more common, and here three methods are highlighted, which have been used extensively in other industries (with several variants in their design) which can potentially measure coatings of nanometer thickness in a production line, precisely, safely, and do so in a non-contact and non-destructive manner. These methods are optical reflectometry, ellipsometry and interferometry.

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“…It can penetrate materials that are opaque to visible light, making it possible to image buried structures and to extract depth-dependent composition (13). When incident at angles between grazing and ~45°, EUV light has a sufficiently high reflectivity to image most samples (14)(15)(16)(17)(18)(19). Combined with the fact that the penetration depth of EUV light is sufficiently long to probe interesting structures in most materials, this makes EUV light well suited for general reflectometry applications.…”

Section: Introductionmentioning

confidence: 99%

Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry

et al. 2021

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Next-generation nano- and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here, we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic sources, the unique chemical sensitivity of extreme ultraviolet reflectometry, and state-of-the-art ptychography imaging algorithms. This tabletop microscope can nondestructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles. High-fidelity imaging was achieved by implementing variable-angle ptychographic imaging, by using total variation regularization to mitigate noise and artifacts in the reconstructed image, and by using a high-brightness, high-harmonic source with excellent intensity and wavefront stability. We validate our measurements through multiscale, multimodal imaging to show that this technique has unique advantages compared with other techniques based on electron and scanning probe microscopies.

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EUV reflectometry for thickness and density determination of thin film coatings

Cited by 16 publications

References 15 publications

Reflectance properties of the Acktar Magic Black™ coating for the radiation near the Lyman-α line of hydrogen: measurements and phenomenological model of the BRDF

Reflectance properties of the Acktar Magic Black™ coating for the radiation near the Lyman-α line of hydrogen: measurements and phenomenological model of the BRDF

Continuous In-Line Chromium Coating Thickness Measurement Methodologies: An Investigation of Current and Potential Technology

Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry

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