EUV mask patterning process to enable opaque SRAFS for bright field EUV mask imaging

Green, Michael; Halle, Scott; Ramadan, Mohamed; Lallement, Romain; Kamberian, Henry H.; Burkhardt, Martin; Beineke, Jinju; Rankin, Jed; Progler, Chris; McDermott, Steven

doi:10.1117/12.2689665

Photomask Technology 2023 2023

DOI: 10.1117/12.2689665

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EUV mask patterning process to enable opaque SRAFS for bright field EUV mask imaging

Michael Green,

Scott Halle,

Mohamed Ramadan

et al.

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EUV mask patterning process to enable opaque SRAFS for bright field EUV mask imaging

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References 5 publications

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