Etching of SiC–SiC-composites by a laser-induced plasma in a reactive gas

Zimmer, Klaus; Ehrhardt, Martin; Lorenz, Pierre; Wang, Xi; Wang, Pingping; Sun, Shufeng

doi:10.1016/j.ceramint.2021.09.084

Cited by 18 publications

(12 citation statements)

References 17 publications

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“…The doped N dopants would destroy the symmetry of the SiC crystal structure so that the thermal photoelectron effect cannot be ignored. Under these conditions, the response speed and current intensity of the photodetection device greatly improve …”

Section: Resultsmentioning

confidence: 99%

“…Under these conditions, the response speed and current intensity of the photodetection device greatly improve. 32 For application etched integrated SiC nanoarray film as the PDs, an individual nanoarray film-based UV PD was developed. In this regard, Figure 3a shows the schematic of the UV Ag-4H-SiC-Ag-based MSM PD with a pair of electrodes with 0.3 mm apart based on a 4H-SiC nanohole array film.…”

Section: Resultsmentioning

confidence: 99%

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High-Performance Ultraviolet Photodetector Based on Single-Crystal Integrated Self-Supporting 4H-SiC Nanohole Arrays

Wang

Chen

et al. 2023

ACS Appl. Mater. Interfaces

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Currently, the photodetectors (PDs) assembled by vertically aligned nanostructured arrays have attracted intensive interest owing to their unique virtues of low light reflectivity and rapid charge transport. However, in terms of the inherent limitations caused by numerous interfaces often existed within the assembled arrays, the photogenerated carriers cannot be effectively separated, thus weakening the performance of target PDs. Aiming at resolving this critical point, a high-performance ultraviolet (UV) PD with a single-crystal integrated self-supporting 4H-SiC nanohole arrays is constructed, which are prepared via the anode oxidation approach. As a result, the PD delivers an excellent performance with a high switching ratio (∼250), remarkable detectivity (6 × 1010 Jones), fast response (0.5 s/0.88 s), and excellent stability under 375 nm light illumination with a bias voltage of 5 V. Moreover, it has a high responsivity (824 mA/W), superior to those of most reported ones based on 4H-SiC. The overall high performance of the PDs could be mainly attributed to the synergistic effect of the SiC nanohole arrays’ geometry, a whole single-crystal integrated self-supporting film without interfaces, established reliable Schottky contact, and incorporated N dopants.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

High-Performance Ultraviolet Photodetector Based on Single-Crystal Integrated Self-Supporting 4H-SiC Nanohole Arrays

Wang

Chen

et al. 2023

ACS Appl. Mater. Interfaces

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“…The replications of the corner points amount to one. The five factors used are composed of the temperature, power, pressure, and the gas flows of oxygen and sulfur hexafluoride [ 21 ]. In the optimal target range, the resolution of the factors is increased in order to determine the target value more precisely.…”

Section: Methodsmentioning

confidence: 99%

Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process

Wittek¹,

Steinhoff²,

Raumel³

et al. 2023

Micromachines

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Downsized and complex micro-machining structures have to meet quality requirements concerning geometry and convince through increasing functionality. The development and use of cutting tools in the sub-millimeter range can meet these demands and contribute to the production of intelligent components in biomedical technology, optics or electronics. This article addresses the development of double-edged micro-cutters, which consist of a two-part system of cutter head and shaft. The cutting diameters are between 50 and 200 μm. The silicon carbide cutting heads are manufactured from the solid material using microsystem technology. The substrate used can be structured uniformly via photolithography, which means that 5200 homogeneous micro-milling heads can be produced simultaneously. This novel batch approach represents a contrast to conventionally manufactured micro-milling cutters. The imprint is taken by means of reactive ion etching using a mask made of electroplated nickel. Within this dry etching process, characteristic values such as the etch rate and flank angle of the structures are critical and will be compared in a parameter analysis. At optimal parameters, an anisotropy factor of 0.8 and an etching rate of 0.34 µm/min of the silicon carbide are generated. Finally, the milling heads are diced and joined. In the final machining tests, the functionality is investigated and any signs of wear are evaluated. A tool life of 1500 mm in various materials could be achieved. This and the milling quality achieved are in the range of conventional micro-milling cutters, which gives a positive outlook for further development.

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“…Continuous fiber-reinforced ceramic matrix composites are composed of high-strength fibers and ceramic matrix 1 and exhibit several properties, including high specific strength, excellent ablation resistance, corrosion resis-tance, low density, low thermal expansion coefficient, and other excellent thermodynamic properties. [2][3][4] Silicon carbide-based composite materials are known to be hightemperature resistant materials that can work safely above 1200 • C. Therefore, in the aerospace field, it is generally believed that SiC f /SiC ceramic matrix composites (CMC-SiC) can replace the superalloys and refractory metal materials currently used in high-performance engines; in addition, these materials could further improve the thermal efficiency of engines, such as turbine engine components, nozzle jet blades, and other hot end components.…”

Section: Introductionmentioning

confidence: 99%

A study of laser machining combined with dynamic chemical etching in micro‐hole drilling of 2.5D SiC_f/SiC composites

Zhao

Sun

Zhang

et al. 2023

Int J Applied Ceramic Tech

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In this study, we used a novel method of laser machining combined with dynamic chemical liquid etching (LMDCE) to drill holes in 2.5D SiCf/SiC ceramic matrix composites (CMC‐SiC). A chemical solution that could quickly remove the recast layer without damaging the substrate was selected. Severe recast layer and microcrack defects were observed when laser machining was performed in the air. The surface of the material was highly carbonized due to the thermal effect of the laser. The effect of different defocus amounts and scanning speeds on the hole taper was studied. A lower scanning speed can ensure that a smaller taper is obtained by the microhole. The bore diameter of the holes processed with a defocusing amount of 0 or −1 mm is more uniform. The results show that with the assistance of a dynamic chemical solution, the fibers break neatly into needle‐like shapes, the thermal effect of the laser on the ceramic substrate is significantly weakened, the microhole shows good roundness, and there are no recast layers and oxides on the sample surface. In addition, microcracks are significantly reduced, and high‐quality microholes without a heat‐affected zone (HAZ) are machined. The method provides a new idea on how to eliminate machining defects and achieve higher‐quality micromachining for ceramic matrix composites.

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Etching of SiC–SiC-composites by a laser-induced plasma in a reactive gas

Cited by 18 publications

References 17 publications

High-Performance Ultraviolet Photodetector Based on Single-Crystal Integrated Self-Supporting 4H-SiC Nanohole Arrays

High-Performance Ultraviolet Photodetector Based on Single-Crystal Integrated Self-Supporting 4H-SiC Nanohole Arrays

Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process

A study of laser machining combined with dynamic chemical etching in micro‐hole drilling of 2.5D SiC_f/SiC composites

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Etching of SiC–SiC-composites by a laser-induced plasma in a reactive gas

Cited by 18 publications

References 17 publications

High-Performance Ultraviolet Photodetector Based on Single-Crystal Integrated Self-Supporting 4H-SiC Nanohole Arrays

High-Performance Ultraviolet Photodetector Based on Single-Crystal Integrated Self-Supporting 4H-SiC Nanohole Arrays

Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process

A study of laser machining combined with dynamic chemical etching in micro‐hole drilling of 2.5D SiCf/SiC composites

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A study of laser machining combined with dynamic chemical etching in micro‐hole drilling of 2.5D SiC_f/SiC composites