2013
DOI: 10.1016/j.carbon.2013.03.038
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Etching mechanism of diamond by Ni nanoparticles for fabrication of nanopores

Abstract: International audienceNanopores in insulating solid state membranes have recently emerged as potential candidates for sorting, probing and manipulating biopolymers, such as DNA, RNA and proteins in their native environment. Here a simple, fast and cost-effective etching technique to create nanopores in diamond membrane by self-assembled Ni nanoparticles is proposed. In this process, a diamond film is annealed with thin Ni layers at 800-850 degrees C in hydrogen atmosphere. Carbon from the diamond-metal interfa… Show more

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Cited by 61 publications
(33 citation statements)
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“…The interaction at the nickel/diamond interface is a key question in a variety of applications, such as epitaxial growth of diamond lms on nickel substrates, 1,2 catalytic etching of diamond surfaces, [3][4][5][6][7][8] and the design of diamond-metal composites with nickel-containing binders. [9][10][11] It is also of great interest from the fundamental point of view as the processes occurring at the nickel/diamond interface exemplify the interaction between two phases, one of which is metastable.…”
Section: Introductionmentioning
confidence: 99%
“…The interaction at the nickel/diamond interface is a key question in a variety of applications, such as epitaxial growth of diamond lms on nickel substrates, 1,2 catalytic etching of diamond surfaces, [3][4][5][6][7][8] and the design of diamond-metal composites with nickel-containing binders. [9][10][11] It is also of great interest from the fundamental point of view as the processes occurring at the nickel/diamond interface exemplify the interaction between two phases, one of which is metastable.…”
Section: Introductionmentioning
confidence: 99%
“…However, the pores do not span the entirety of the diamond film and the pore density is often very high. [43][44][45][46] Masuda and coworkers reported a method for the fabrication of sub-micron thru-hole pores in polycrystalline diamond using oxygen plasma etching. [47] However, the dense array produced rendered the material microporous making it unsuitable for particle translocation studies.…”
Section: Accepted Manuscriptmentioning
confidence: 99%
“…Instead of using diamond wires, several teams suggested the use of diamond pores to avoid any problem linked to access resistance [170,171]. They thus show that a local etching of the diamond surface is possible using metallic nanoparticles.…”
Section: Straightforward Structurationmentioning
confidence: 99%