Etch rate prediction in plasma etching using feed forward Error-Back Propagation neural network model

Song, Hyo‐Jong; Noh, Ho-Taek; Kim, Dong-Il; Han, Seung-Soo

doi:10.1109/cstic.2015.7153456

2015 China Semiconductor Technology International Conference 2015

DOI: 10.1109/cstic.2015.7153456

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Etch rate prediction in plasma etching using feed forward Error-Back Propagation neural network model

Hyo‐Jong Song

Ho-Taek Noh

Dong-Il Kim

et al.

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Etch rate prediction in plasma etching using feed forward Error-Back Propagation neural network model

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References 4 publications

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