Estudio de un microacelerómetro realimentado con actuación  electrostática y transducción saw

Pulido, Guerra; Octavio, Jaime

doi:10.22201/dgpyfe.9786070258381e.2014

Cited by 1 publication

(1 citation statement)

References 132 publications

(224 reference statements)

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“…For this reason, it was necessary to find an equation to normalise the transform of the spatial charge density and obtain independence between spectrum magnitude and the number of points used to calculate it. It has been demonstrated that the relationship between spatial charge density and its spectrum is given by [26, 27]

Q = \int_{- a}^{a} ψ (x) d x = \frac{a}{π} \int_{- \infty}^{normal∞} \overset{false^}{ψ} ()(, k) normald k

where Q is the electric charge stored at the IDT, ψ ( x ) is the spatial charge density and it is an even function,

\overset{false^}{ψ} ()(, k)

is its FT, − a and a are the positions of the edges of IDT and 2 a is the length of the IDT. The left‐hand side term of (1) is related with the charge storage at the IDT and it is known that the energy stored in a capacitor is given by

E_{c} = \frac{Q^{2}}{2 C}

where C is the capacitance and considering the next equation

\overset{false^}{ψ} ()(, k) = α \hat{ψ^{normal′}} ()(, k)

where α is a constant of proportionality and

\hat{ψ^{normal′}} ()(, k)

is the denormalised function which represents the spectrum obtained by the FFT.…”

Section: Theoretical Analysismentioning

confidence: 99%

Theoretical and experimental characterisation of a SAW delay line through its Y ‐matrix

Guerra-Pulido

Pérez-Alcázar

Álvarez‐Zauco

2016

IET Circuits, Devices & Systems

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Surface acoustic wave (SAW) delay lines are commonly used devices, and it is important to characterise them to find the causes of deviations between the experimental and theoretical behaviour in order to consider them during design. The authors present the theoretical characteristics and the characterisation of a SAW delay line through X-ray diffraction, energy dispersive X-ray fluorescence, scanning electron microscopy, atomic force microscopy and the measurement of S-parameters. Using the S-parameters, the Y-parameters were calculated and comparing them with those obtained theoretically, they found disagreement in their magnitudes and also that the experimental SAW velocity was 2.8% larger than the theoretical one. The magnitude of experimental Y11 is smaller than that obtained theoretically because of the ill-defined profile and the metallisation ratio of the electrodes is not ideal due to inherent limitations in the fabrication process, and besides Y21 is smaller than expected because the attenuation of the SAW when it propagates through the delay line. When the electrode defects, the experimental SAW velocity and the attenuation coefficient of SAW in this material are considered in the theoretical calculations, agreement is found between theoretical and experimental results. This procedure is based in the comparison between experimental and theoretical Y-parameters and could be used to estimate attenuation, electrode capacitance and SAW velocity.

show abstract

Q = \int_{- a}^{a} ψ (x) d x = \frac{a}{π} \int_{- \infty}^{normal∞} \overset{false^}{ψ} ()(, k) normald k

where Q is the electric charge stored at the IDT, ψ ( x ) is the spatial charge density and it is an even function,

\overset{false^}{ψ} ()(, k)

E_{c} = \frac{Q^{2}}{2 C}

where C is the capacitance and considering the next equation

\overset{false^}{ψ} ()(, k) = α \hat{ψ^{normal′}} ()(, k)

where α is a constant of proportionality and

\hat{ψ^{normal′}} ()(, k)

is the denormalised function which represents the spectrum obtained by the FFT.…”

Section: Theoretical Analysismentioning

confidence: 99%

Theoretical and experimental characterisation of a SAW delay line through its Y ‐matrix

Guerra-Pulido

Pérez-Alcázar

Álvarez‐Zauco

2016

IET Circuits, Devices & Systems

View full text Add to dashboard Cite

show abstract

Estudio de un microacelerómetro realimentado con actuación electrostática y transducción saw

Cited by 1 publication

References 132 publications

Theoretical and experimental characterisation of a SAW delay line through its Y ‐matrix

Theoretical and experimental characterisation of a SAW delay line through its Y ‐matrix

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