Estimation of Electron Density and Temperature by Continuum Spectrum in a Moving Atmospheric-Pressure Nonthermal-Equilibrium Argon Plasma Bullet

Yambe, Kiyoyuki; Izumida, Tomoya; Akatsuka, Hiroshi

doi:10.1109/tps.2022.3201616

Cited by 3 publications

(2 citation statements)

References 47 publications

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“…Hence, in order to confirm the potential of the method of OES measurement of continuum emission and the specific precautions to be taken when implementing it, the author's group also launched experimental research and confirmed the effectiveness of this method through various measurements and cross-checks. 57,[60][61][62] The author's group have been studying with validity examination whether the EEDF should be Maxwellian, Druyvesteynian, or something else. The author is also proposing mathematical methods to presume the arbitrary EEDF from the observed continuum emission as remarkable issues with originality.…”

Section: Measurement Of Electron Temperature and Density Using Contin...mentioning

confidence: 99%

“…58,59) Therefore, the author's laboratory has also been intensively pursuing this possibility over the past few years. 57,[60][61][62] Nowadays, the OES of the continuum spectrum is confirmed as a reliable measurement method of not only the electron temperature and density, but also the electron energy distribution function (EEDF), using simple and practical experimental equipment. [63][64][65] In the case of atmospheric-pressure nonequilibrium plasma, there are many neutral atoms to collide with, so bremsstrahlung as a continuous spectrum can be measured with considerable intensity.…”

Section: Introductionmentioning

confidence: 99%

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Quantitative analysis of optical emission spectroscopy for plasma process monitoring

Akatsuka

2024

Jpn. J. Appl. Phys.

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Plasma parameters should be evaluated to control the plasma process adequately with non-invasive method, one of which is the optical emission spectroscopy (OES) measurement. Some OES studies are reviewed to measure electron density N e, electron temperature T e and electron energy distribution function (EEDF) of argon plasma with low-electron temperature (T e ∼ 1−10 eV) under not only low-pressure condition but also atmospheric-pressure discharge. The basics and applications of a method are described using the "collisional radiative model." The methods to deduce the plasma parameters are explained in terms of detailed description of kinetic balance of excited states with elementary processes in the non-equilibrium plasma. In addition, research results on the measurement method of electron temperature, density, and EEDF are introduced for the measurement of atmospheric-pressure non-equilibrium plasma using OES measurement of continuum emission.

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Section: Measurement Of Electron Temperature and Density Using Contin...mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Quantitative analysis of optical emission spectroscopy for plasma process monitoring

Akatsuka

2024

Jpn. J. Appl. Phys.

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Plasma propagation velocity dependence on driving and restricting forces

Yambe,

Ohyama,

Sato

2024

AIP Advances

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According to the time-averaged expression for an alternating electric field, the normalized electromagnetic pressure is proportional to the square of the voltage intensity and inversely proportional to the square of the voltage repetition frequency. Moreover, the plasma propagation velocity is either directly proportional, inversely proportional, or nonproportional to the normalized electromagnetic pressure at all neutral gas flow rates. Because the plasma current is only directly proportional to the normalized electromagnetic pressure at all neutral gas flow rates, the dependence of the plasma density on the electromagnetic pressure changes to obtain a balance of dependence. In the momentum transfer equation, plasma density does not originally depend on electromagnetic pressure, but the dynamic pressure associated with the neutral gas flow also exerts a force on the plasma through collisions. Therefore, when the ionization generation of plasma by collisions between the plasma and neutral particles is dominant over recombination by collisions, the plasma density is square proportional or directly proportional to the electromagnetic pressure.

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Comparison of Electron Densities and Temperatures in Helium and Argon Nonthermal Atmospheric-Pressure Plasmas by Continuum Spectral Analysis

Yambe,

Izumida,

Ohyama

et al. 2024

IEEE Trans. Plasma Sci.

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Estimation of Electron Density and Temperature by Continuum Spectrum in a Moving Atmospheric-Pressure Nonthermal-Equilibrium Argon Plasma Bullet

Cited by 3 publications

References 47 publications

Quantitative analysis of optical emission spectroscopy for plasma process monitoring

Quantitative analysis of optical emission spectroscopy for plasma process monitoring

Plasma propagation velocity dependence on driving and restricting forces

Comparison of Electron Densities and Temperatures in Helium and Argon Nonthermal Atmospheric-Pressure Plasmas by Continuum Spectral Analysis

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