Estimating the Sensitivity of Microoptoelectromechanical Micro-g Accelerometer

Barbin, Evgenij S.; Nesterenko, Tamara G.; Koleda, Aleksej N.; Shesterikov, E. V.; Kulinich, Ivan V.; Sheyerman, Fedor I.

doi:10.1109/edm55285.2022.9855054

Cited by 5 publications

(4 citation statements)

References 13 publications

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“…For such a design of the waveguides and working wavelength, the distance between the waveguides and coupling length determined the amount of power transmitted from the input port to the output one. Under acceleration ay, the proof mass displaced along the Y axis; the gap between the moving and fixed waveguides changed (Figure 1), which altered the output optical power Popt that was proportional to the measured acceleration ay [34]. According to the accelerometer fabrication process (Section 3), the initial gap formed between the waveguides exceeded its working value.…”

Section: Functional Schemementioning

confidence: 99%

“…The directional coupler is the basic functional element of the MOEM accelerometer's optical transducer that has the highest practical potential. The designs of MOEM accelerometers with optical displacement sensors based on the tunneling effect are highly promising in terms of the achievable compactness and high sensitivity [32][33][34]. To increase the sensitivity, optical resonators are used; however, they are highly sensitive to temperature.…”

Section: Introductionmentioning

confidence: 99%

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The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

Barbin,

Nesterenko,

Koleda

et al. 2024

Sensors

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This treatise studies a microoptoelectromechanical accelerometer (MOEMA) with an optical measuring transducer built according to the optical tunneling principle (evanescent coupling). The work discusses the design of the accelerometer’s microelectromechanical sensing element (MSE) and states the requirements for the design to achieve a sensitivity threshold of 1 µg m/s2 at a calculated eigenvalue of the MSE. The studies cover the selection of the dimensions, mass, eigenfrequency and corresponding stiffness of the spring suspension, gravity-induced cross-displacements. The authors propose and experimentally test an optical transducer positioning system represented by a capacitive actuator. This approach allows avoiding the restrictions in the fabrication of the transducer conditioned by the extremely high aspect ratio of deep silicon etching (more than 100). The designed MOEMA is tested on three manufactured prototypes. The experiments show that the sensitivity threshold of the accelerometers is 2 µg. For the dynamic range from minus 0.01 g to plus 0.01 g, the average nonlinearity of the accelerometers’ characteristics ranges from 0.7% to 1.62%. For the maximum dynamic range from minus 0.015 g to plus 0.05 g, the nonlinearity ranges from 2.34% to 2.9%, having the maximum deviation at the edges of the regions. The power gain of the three prototypes of accelerometers varies from 12.321 mW/g to 26.472 mW/g. The results provide broad prospects for the application of the proposed solutions in integrated inertial devices.

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Section: Functional Schemementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

Barbin,

Nesterenko,

Koleda

et al. 2024

Sensors

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“…The threshold sensitivity of the accelerometer-the minimal signal that can be measured-can be quantitatively estimated as the noise-equivalent acceleration (NEA) in units of g/ √ Hz (g = 9.81 m/s 2 ) [40,41].…”

Section: Coupling Lengthmentioning

confidence: 99%

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

et al. 2023

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Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages—such as high sensitivity and immunity to electromagnetic noise—over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelerometers, which include a spring mass and a tunneling-effect-based optical sensing system containing an optical directional coupler consisting of a fixed and a movable waveguide separated by an air gap. The movable waveguide can perform linear and angular movement. In addition, the waveguides can lie in single or different planes. Under acceleration, the schemes feature the following changes to the optical system: gap, coupling length, overlapping area between the movable and fixed waveguides. The schemes with altering coupling lengths feature the lowest sensitivity, yet possess a virtually unlimited dynamic range, which makes them comparable to capacitive transducers. The sensitivity of the scheme depends on the coupling length and amounts to 11.25 × 103 m−1 for a coupling length of 44 μm and 30 × 103 m−1 for a coupling length of 15 μm. The schemes with changing overlapping areas possess moderate sensitivity (1.25 × 106 m−1). The highest sensitivity (above 6.25 × 106 m−1) belongs to the schemes with an altering gap between the waveguides.

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“…The circuit noise is minimal, which can be neglected compared to the light source noise. For the accelerometer, the shot noise determines the limit noise of the system, [ 128 ] which is caused by the electron emission inhomogeneity and represents the limit level of the light source noise. At present, signal modulation or differential circuits are generally used to suppress the light source noise.…”

Section: Critical Problems and Solutions For Optical Interferometric ...mentioning

confidence: 99%

Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios.

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Estimating the Sensitivity of Microoptoelectromechanical Micro-g Accelerometer

Cited by 5 publications

References 13 publications

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

Optical Interferometric MEMS Accelerometers

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