ESCA studies on changes in surface composition under ion bombardment

Holm, Ragnar; Storp, S.

doi:10.1007/bf00900076

Cited by 119 publications

(27 citation statements)

References 23 publications

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“…4 ARXPS results for Bi4i are represented at angles of 90 ~ and 30 ~ At an angle of 30 ~ a second peak emerges at a lower binding energy, which indicates a reduction of Bi20 3 at the outermost part of the top-layer. This reduction could be caused by the mild argon ion sputtering as observed by Holm and Storp [7] for Bi20 3. The maximum of the distribution of the argon ions after a mild sputtering is situated significantly below the surface [8].…”

Section: Resultsmentioning

confidence: 84%

In-depth compositional analysis of ceramic (Bi2O3)0.75(Er2O3)0.25 by AES and XPS

Hanekamp

Berg

et al. 1990

Mikrochim Acta

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Abstract. The chemical composition of dense ceramics of erbia-stabilized 6-Bi203 was analyzed by Auger electron spectroscopy (AES) depth profiling using Ar + ion sputtering. The relative sensitivity factors (rsI) and sputter rates of bismuth and erbium in this material have been determined by electron probe microanalysis (EPMA) and chemical analysis. These results, supplemented by data from angle resolved X-ray photoelectron spectroscopy (ARXPS), shows a bismuth enrichment at the surface. Evidence has been found for reduction of the bismuth-oxide at the outermost part of the surface layer.Key words: AES, ceramic, sputtering, XPS.As discussed by Burggraaf and Winnubst [1] the chemical composition of grain boundaries and surfaces of ceramic materials controls sintering behaviour, grain growth and related properties such as fracture strength, toughness, wear resistance and also electrochemical and catalytic properties. Ceramic erbia stabilized 6-Bi203 may find commercial use in oxygen pumps, sensors and solid oxide fuel cells because of its high oxide ion conductivity. The aim of our research is to elucidate a possible segregation at the surface of this type of material.Auger electron spectroscopy (AES) can be applied for quantitative analysis of surfaces, provided that the relative sensitivity factors (rst) are known. The rsf values of the elements are known from literature [2] but often not applicable for composite materials, as for example shown by Keim and Aite [3] for silicon nitride. Experi-

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Section: Resultsmentioning

confidence: 84%

In-depth compositional analysis of ceramic (Bi2O3)0.75(Er2O3)0.25 by AES and XPS

Hanekamp

Berg

et al. 1990

Mikrochim Acta

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“…A new peak was observed near 0 eV binding energy. 3. The spectra that were changed by sputtering were returned to their original shapes after 18 h in a high vacuum following the sputtering.…”

Section: Resultsmentioning

confidence: 99%

“…They reported that amorphous ZrO 2 was crystallized by ion sputtering [1,2]. On the other hand, changes in the XPS spectra of ZrO 2 caused by preferential sputtering of oxygen were shown by Holm et al [3] and Hofmann et al [4,5]. Subsequently, Kelly reported the loss of oxygen from ionbombarded ZrO 2 using XPS with Bertóti et al [6] and Iacona et al [7].…”

Section: Introductionmentioning

confidence: 94%

Changes in X-ray photoelectron spectra of yttria-tetragonal zirconia polycrystal by ion sputtering

Watanabe

Yoshinari

2016

Appl. Phys. A

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This paper reports changes in X-ray photoelectron spectroscopy spectra of yttria-tetragonal zirconia polycrystal (Y-TZP) brought about by Ar ion sputtering. The changes in the core-level spectra of Y-TZP suggest that preferential sputtering of oxygen occurred. A new peak was observed near 0 eV binding energy accompanied with changes in the corelevel spectra by the sputtering. After 18 h in a high vacuum following the sputtering, the spectra changed by the sputtering were returned to their original shapes. In contrast, the color of Y-TZP was changed from white to pale brown by X-ray irradiation and was changed from pale brown to dark gray by ion sputtering. However, when the new peak near 0 eV decreased after 18 h, no color change was observed. Therefore, it is thought that the new peak was mainly derived from electrons trapped in various kinds of oxygen vacancies created by the sputtering in other than color centers.

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“…Although conventional ion etching can easily remove such an oxide layer, the elemental ratio is changed by the difference in sputtering yield. [6,7] Furthermore, the elemental ratio in a bulk alloy is often laterally inhomogeneous because of the formation of precipitates or segregation. These influences cause discrepancies in the elemental ratio.…”

Section: Introductionmentioning

confidence: 99%

Experimental calibration curve for quantitative XPS analysis constructed from in situ fractured polycrystalline manganese silicide surfaces

Ohtsu

Oku

Shishido

et al. 2012

Surface & Interface Analysis

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In the present study, we prepared clean surfaces of polycrystalline Mn 3 Si, MnSi, and Mn 11 Si 19 by fracturing them in a spectrometer under an ultrahigh vacuum, and then attempted to construct a calibration curve for a quantitative XPS analysis by measuring these clean surfaces. We ensured that there were no C 1s and O 1s peaks in the survey XPS spectra for the fractured surfaces. In the case of Mn 11 Si 19 , a positive chemical shift in the binding energy of the Mn 2p level was observed, whereas a slight negative shift in the binding energy of the Si 2p level was observed in the cases of MnSi and Mn 3 Si. The spectral intensity ratios of Mn 3p to Si 2p and Mn 3s to Si 2p were proportional to the atomic ratio of Mn to Si, indicating that these relationships could be used as the calibration curve. On the other hand, no linear relationship was observed for the ratio of Mn 2p to Si 2p.

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ESCA studies on changes in surface composition under ion bombardment

Cited by 119 publications

References 23 publications

In-depth compositional analysis of ceramic (Bi2O3)0.75(Er2O3)0.25 by AES and XPS

In-depth compositional analysis of ceramic (Bi2O3)0.75(Er2O3)0.25 by AES and XPS

Changes in X-ray photoelectron spectra of yttria-tetragonal zirconia polycrystal by ion sputtering

Experimental calibration curve for quantitative XPS analysis constructed from in situ fractured polycrystalline manganese silicide surfaces

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