Our system is currently under heavy load due to increased usage. We're actively working on upgrades to improve performance. Thank you for your patience.
1979
DOI: 10.1016/0368-2048(79)85017-3
|View full text |Cite
|
Sign up to set email alerts
|

ESCA investigations of ion beam effects on surfaces

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
18
0

Year Published

1979
1979
2016
2016

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 68 publications
(18 citation statements)
references
References 18 publications
0
18
0
Order By: Relevance
“…Similar reduction of oxides by ion bombardment has been already reported. 17,19,20 The chemical changes of cobalt observed for this sample by ESCA should also induce different patterns in the SIMS spectra due to different sputter yields of various ionic states of Co. The SIMS analysis for Crdoped COO containing 0.9 at% Cr confirmed this assumption.…”
Section: Polycrystalline Coo-cr203 Solid Solutionsmentioning
confidence: 72%
“…Similar reduction of oxides by ion bombardment has been already reported. 17,19,20 The chemical changes of cobalt observed for this sample by ESCA should also induce different patterns in the SIMS spectra due to different sputter yields of various ionic states of Co. The SIMS analysis for Crdoped COO containing 0.9 at% Cr confirmed this assumption.…”
Section: Polycrystalline Coo-cr203 Solid Solutionsmentioning
confidence: 72%
“…Polystyrene, which is a notoriously sensitive polymer in this respect, has been shown to lose its aromatic features as reflected in the TC-TC* shake-up satellite, after doses of lo', 5 keV Ar+ ions per c m 2 . 24 In another study of the same polymer, a dose of 1.6 x lo', 4 keV Ar+ per cm2 was reported to have the same effect.6 In a study of PMMA a dose of lo', 2 keV Ari per cm2 was shown by XPS to sputter the carbonyl functionality preferen ti all^.^^ It can be argued that SIMS should be more sensitive to early stages of ion beam damage than XPS, since this damage will affect the outermost layers first. SIMS is more surface-sensitive and will detect small structural changes that XPS cannot pick up.…”
Section: Beam Damage Effectsmentioning
confidence: 99%
“…7,8 Ion bombardment is a widely used means to fabricate, 9 modify, 10 clean, and analyze nanostructures. [14][15][16][17] All of these transformations will affect both the chemical and physical properties of the nanostructures, independently or collectively. [14][15][16][17] All of these transformations will affect both the chemical and physical properties of the nanostructures, independently or collectively.…”
Section: Introductionmentioning
confidence: 99%