Error analysis of phase shifting by varying the incident angle of parallel beams in shadow Moiré

Mu, Jianxin; Guan, Zhenyu; Kang, Jun; Bian, Tianya; Su, Fei

doi:10.1016/j.ijleo.2013.05.073

Cited by 1 publication

(2 citation statements)

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“…Optical metrology possesses the advantages of being a non-contact method and having high resolution and efficiency for workpiece contour measurement and surface quality inspection. Several methods exist for measuring optical topography, including the stereoscopic method, structured light, laser triangulation, conoscopic holography, the moiré method, and heterodyne interferometry [1,2,3,4,5,6,7,8,9,10,11,12,13].…”

Section: Introductionmentioning

confidence: 99%

“…Practically, the accuracy of the moiré method can be affected by errors induced during phase-shifting. Mu et al [12] investigated the error analysis of the phase-shifting in shadow moiré by changing the incidence angle of the collimating beams. Experiments were performed to verify the proposed technique, and the results were found to be 5% better than those of the conventional phase-shifting technique.…”

Section: Introductionmentioning

confidence: 99%

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Optical Inspection System for Gear Tooth Surfaces Using a Projection Moiré Method

Chen

2019

Sensors

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The demand for rapid online optical inspection of gear tooth surfaces is increasing, especially for precision gears. In this study, a non-contact optical measurement method was established for the inspection of gear tooth surfaces. For the system architecture, a halogen lamp was selected as the light source, and a collimated beam was produced by an autocollimator. Subsequently, moiré fringes were formed as the collimated beam went through the two linear gratings. The moiré fringes projected on the gear tooth surface were recorded with a charge-coupled device (CCD) camera, and the contour of the gear tooth surface was estimated and reconstructed from the phase information of the fringes by our developed computer codes. To verify the accuracy of the system, a spur gear tooth surface measured by a commercial coordinate measuring machine (CMM) was defined as the reference tooth profile. The tooth topography, involute profile deviation, and axial-direction deviation were successfully calculated by measuring the deviation of the optically measured surface based on the reference gear tooth profiles measured using the CMM.

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