Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages

Abstract

A robust laser measurement system (LMS), consisting of a sensor head and a detecting part, for simultaneously measuring five-degree-of-freedom (five-DOF) error motions of linear stages, is proposed and characterized. For the purpose of long-travel measurement, all possible error sources that would affect the measurement accuracy are considered. This LMS not only integrates the merits of error compensations for the laser beam drift, beam spot variation, detector sensitivity variation, and non-parallelism of dual-beam that have been resolved by the author’s group before, but also eliminates the crosstalk errors among five-DOF error motions in this study. The feasibility and effectiveness of the designed LMS and modified measurement model are experimentally verified using a laboratory-built prototype. The experimental results show that the designed LSM has the capability of simultaneously measuring the five-DOF error motions of a linear stage up to one-meter travel with a linear error accuracy in sub-micrometer and an angular error accuracy in sub-arcsecond after compensation.

Real-Time Correction and Stabilization of Laser Diode Wavelength in Miniature Homodyne Interferometer for Long-Stroke Micro/Nano Positioning Stage Metrology

“…Figure 4 shows two comprehensive wavelength stabilization methods. As show in Figure 4a, method I is based on the principle of the laser beam drift compensation, which has been introduced in our previous researches [32]. The output of AS1 is adopted to feedback control the angle of an angle mirror mount (AMM), in which two mini-PZTs (PZT_a, PZT_b) are embedded into the threaded shafts of the AMM.…”

Long binary coding design for absolute positioning using genetic algorithm

“…It enables the retrieval of the original working position in the event of unexpected downtime, thereby minimizing the production of scrap and defective products with a compact module [28] and ability of multiple-degree-of-freedom measurement [29,30]. Overall, precision measurement methods play an indispensable role in enhancing manufacturing processes, ensuring accuracy, and optimizing efficiency in high-end manufacturing industries [31][32][33][34][35].…”

A Targetless Method for Simultaneously Measuring Three-Degree-of-Freedom Angular Motion Errors with Digital Speckle Pattern Interferometry

“…The research of optical measurement methods mostly concentrates on the laser multi-DOF measurement system [ 12 , 13 , 14 ], which can be divided into the laser collimation method, laser interferometry method, and combination method of laser collimation and laser interferometry. Sun et al [ 15 ] proposed a simultaneous measurement method of three-degree-of-freedom (3-DOF) based on the autocollimation.…”