Abstract:Er-doped waveguide amplifiers (EDWA) require high doping levels due to their length limit of a few to tens of cm, making the host selection of great importance to avoid deleterious high concentration effects. The wet thermal oxides of InAlP (lattice matched to GaAs) are phosphate rich, making them an attractive rare earth host for EDWAs where monolithic integration of pump lasers may be possible. InAlP epilayers are partially oxidized in water vapor (4 h, 500 °C). Er-implantation (300 keV, 10 15 cm -2 total do… Show more
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