1996
DOI: 10.1088/0960-1317/6/1/036
|View full text |Cite
|
Sign up to set email alerts
|

Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems

Abstract: Lumped-parameter electromechanical transducers are examined theoretically with special regard to their dynamic electromechanical behaviour and equivalent circuits used to represent them. The circuits are developed starting from basic electromechanical transduction principles and the electrical and mechanical equations of equilibrium. Within the limits of the assumptions on boundary conditions, the theory presented is exact with no restrictions other than linearity. Elementary electrostatic, electromagnetic, an… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

1
142
0

Year Published

2002
2002
2016
2016

Publication Types

Select...
5
2
2

Relationship

0
9

Authors

Journals

citations
Cited by 294 publications
(145 citation statements)
references
References 14 publications
1
142
0
Order By: Relevance
“…Simple lumped element models of MEMS actuators with a single degree of freedom [14][15][16][17] result in easy calculations but fail to capture details of the behavior beyond pull-in. At the other end of modeling complexities, simulations of MEMS actuators beyond pull-in have been done using 3D models [18].…”
Section: Introductionmentioning
confidence: 99%
“…Simple lumped element models of MEMS actuators with a single degree of freedom [14][15][16][17] result in easy calculations but fail to capture details of the behavior beyond pull-in. At the other end of modeling complexities, simulations of MEMS actuators beyond pull-in have been done using 3D models [18].…”
Section: Introductionmentioning
confidence: 99%
“…These parameters are directly related to the mechanical characteristics of the SNT and the molecules eventually trapped between its tips. As the frequency response of the bare SNT is known (F T and Q T ), the molecular bundle mechanical characteristics (stiffness and viscosity) can be extracted using the wellestablished damped oscillator model 19 . When the tips of the SNT (without DNA) are inserted in the solution (Figure 1e), the resonance frequency of the bare SNT drops owing to the added mass 20 .…”
Section: The Silicon Nanotweezersmentioning
confidence: 99%
“…The main idea of this method is to develop a MEMS macromodel as a four-terminal circuit (n-terminal in a general case) as: (37) where I a , U a are current and voltage at the macromodel input, I b , U b are current and voltage at the output. It is suggested to obtain equation (37) …”
Section: Building Mems Macromodel As a Four-terminalmentioning
confidence: 99%