Equivalent-circuit model for electrostatic micro-torsion mirror

Abstract

An equivalent circuit model for micro-torsion mirror is reported, which uses open-source circuit simulator Qucs and demonstrated mixed simulation between micro mechanics and electrical circuit. In the simulation, electrostatic force, equation of motion, and Kirchhoff's law are considered. Mathematical operation in the equation of motion is interrupted as an electrical capacitor, so that a seamless multi-physics mixed simulation becomes possible.