2020
DOI: 10.1007/s00542-020-04849-y
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Equivalent circuit for capacitive micromachined ultrasonic transducers to predict anti-resonances

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Cited by 3 publications
(1 citation statement)
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“…In (Tawfik et al, 2019), a CMUT with a reduced-gap architecture implemented in the polysilicon multiuser MEMS processes (PolyMUMPs) technology is introduced. An improved lumped element parametric model for immersed CMUT is presented in (Kemal et al, 2020). The North University of China (NUC) has conducted many explorations for CMUT (Hongliang et al, 2018a;Hongliang et al, 2014;Jinlong et al, 2015;Wang et al, 2019;Zhang et al, 2019), the application of CMUT in medical ultrasound imaging is the purpose of NUC research.…”
Section: Introductionmentioning
confidence: 99%
“…In (Tawfik et al, 2019), a CMUT with a reduced-gap architecture implemented in the polysilicon multiuser MEMS processes (PolyMUMPs) technology is introduced. An improved lumped element parametric model for immersed CMUT is presented in (Kemal et al, 2020). The North University of China (NUC) has conducted many explorations for CMUT (Hongliang et al, 2018a;Hongliang et al, 2014;Jinlong et al, 2015;Wang et al, 2019;Zhang et al, 2019), the application of CMUT in medical ultrasound imaging is the purpose of NUC research.…”
Section: Introductionmentioning
confidence: 99%